Principle and Accuracy of the Stitching Interferometer

[in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]

Journals >Acta Optica Sinica >Volume 23 >Issue 10 >Page 1241 > Article

Acta Optica Sinica
Vol. 23, Issue 10, 1241 (2003)

Principle and Accuracy of the Stitching Interferometer

[in Chinese]^1、*, [in Chinese]², [in Chinese]², [in Chinese]², and [in Chinese]¹

Author Affiliations

¹[in Chinese]

²[in Chinese]

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[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Principle and Accuracy of the Stitching Interferometer[J]. Acta Optica Sinica, 2003, 23(10): 1241 Copy Citation Text

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Abstract

A kind of method is introduced for inspecting the large aperture optics using a small aperture interferometer. The resolving process of the stitching parameter is discussed based on the statistic method. Furthermore the regressive analyzing method has been used in discussing the stitching accuracy. The experiment and the calculation example are given.

Keywords

inspection accuracy subaperture stitching physical optics

[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Principle and Accuracy of the Stitching Interferometer[J]. Acta Optica Sinica, 2003, 23(10): 1241

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