The binarizing distortions and sampling effects of computer generated hologram (OGH) for optical interconnection of very large scale integrated circurts (VLSI) are analyzed. Binarization of transmittance function of OGH will bring some noises but high signal-noise-ratio in detector plane will be achieved. Two kinds of sampling methods, Nyqulst sampling and Whittaker-Shannon sampling are analyzed and compared, in the condition that CGH in the form of Fresnel zone plate is employed as diffractive or reflective optical interconnection element.