• Photonic Sensors
  • Vol. 11, Issue 4, 457 (2021)
Mojtaba HOSSEINZADEH SANI1, Hamed SAGHAEI2、*, Mohammad Amin MEHRANPOUR3, and Afsaneh ASGARIYAN TABRIZI4
Author Affiliations
  • 1Department of Electrical Engineering, Imam Reza International University, Mashhad 9138833186, Iran
  • 2Department of Electrical Engineering, Shahrekord Branch, Islamic Azad University, Shahrekord 8813733395, Iran
  • 3Department of Electrical Engineering, Sari Branch, Islamic Azad University, Sari 4816119318, Iran
  • 4Academic Center for Education, Culture, and Research (ACECR), Tabriz 5156845195, Iran
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    DOI: 10.1007/s13320-020-0607-0 Cite this Article
    Mojtaba HOSSEINZADEH SANI, Hamed SAGHAEI, Mohammad Amin MEHRANPOUR, Afsaneh ASGARIYAN TABRIZI. A Novel All-Optical Sensor Design Based on a Tunable Resonant Nanocavity in Photonic Crystal Microstructure Applicable in MEMS Accelerometers[J]. Photonic Sensors, 2021, 11(4): 457 Copy Citation Text show less

    Abstract

    In view of the large scientific and technical interest in the microelectromechanical system (MEMS) accelerometer sensor and the limitations of capacitive, resistive piezo, and piezoelectric methods, we focus on the measurement of the seismic mass displacement using a novel design of the all-optical sensor (AOS). The proposed AOS consists of two waveguides and a ring resonator in a two-dimensional rod-based photonic crystal (PhC) microstructure, and a holder which connects the central rod of a nanocavity to a proof mass. The photonic band structure of the AOS is calculated with the plane-wave expansion approach for TE and TM polarization modes, and the light wave propagation inside the sensor is analyzed by solving Maxwell’s equations using the finite-difference time-domain method. The results of our simulations demonstrate that the fundamental PhC has a free spectral range of about 730 nm covering the optical communication wavelength-bands. Simulations also show that the AOS has the resonant peak of 0.8 at 1.644 μm, quality factor of 3 288, full width at half maximum of 0.5 nm, and figure of merit of 0.97. Furthermore, for the maximum 200 nm nanocavity displacements in the x- or y-direction, the resonant wavelengths shift to 1.618 μm and 1.547 μm, respectively. We also calculate all characteristics of the nanocavity displacement in positive and negative directions of the x-axis and y-axis. The small area of 104.35 μm2 and short propagation time of the AOS make it an interesting sensor for various applications, especially in the vehicle navigation systems and aviation safety tools.
    Mojtaba HOSSEINZADEH SANI, Hamed SAGHAEI, Mohammad Amin MEHRANPOUR, Afsaneh ASGARIYAN TABRIZI. A Novel All-Optical Sensor Design Based on a Tunable Resonant Nanocavity in Photonic Crystal Microstructure Applicable in MEMS Accelerometers[J]. Photonic Sensors, 2021, 11(4): 457
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