Metasurface-based nanoprinting: principle, design and advances

Rao Fu; Kuixian Chen; Zile Li; Shaohua Yu; Guoxing Zheng

doi:10.29026/oes.2022.220011

Journals >Opto-Electronic Science >Volume 1 >Issue 10 >Page 220011 > Article

Opto-Electronic Science
Vol. 1, Issue 10, 220011 (2022)

Metasurface-based nanoprinting: principle, design and advances

Rao Fu^1、†, Kuixian Chen^1、†, Zile Li^1、2、†, Shaohua Yu^2、*, and Guoxing Zheng^{1、2、3、4、**}

Author Affiliations

¹School of Electronic Information and School of Microelectronics, Wuhan University, Wuhan 430072, China

²Peng Cheng Laboratory, Shenzhen 518055, China

³Wuhan Institute of Quantum Technology, Wuhan 430206, China

⁴Hubei Luojia Laboratory, Wuhan 430079, China

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DOI: 10.29026/oes.2022.220011 Cite this Article

Rao Fu, Kuixian Chen, Zile Li, Shaohua Yu, Guoxing Zheng. Metasurface-based nanoprinting: principle, design and advances[J]. Opto-Electronic Science, 2022, 1(10): 220011 Copy Citation Text

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Rao Fu, Kuixian Chen, Zile Li, Shaohua Yu, Guoxing Zheng. Metasurface-based nanoprinting: principle, design and advances[J]. Opto-Electronic Science, 2022, 1(10): 220011

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