Shizhuang Sun, Chunshui Jin, Bo Yu, Tao Guo, Shun Yao, Chun Li, Wenyuan Deng. Research on Surface Roughness Related Coating Processes of Mo/Si Multilayers[J]. Acta Optica Sinica, 2020, 40(10): 1031002
- Acta Optica Sinica
- Vol. 40, Issue 10, 1031002 (2020)
Fig. 1. Schematic of binary collision
Fig. 2. Flow chart of movement calculation of depositing particles
Fig. 3. Schematic of magnetron sputtering atomic deposition
Fig. 4. Cosine of incident angle distributions of Mo and Si atoms. (a)(b) Varying with gas pressure; (c)(d) varying with target-substrate distance
Fig. 5. Incident energy distributions of Mo and Si atoms. (a)(b) Varying with gas pressure; (c)(d) varying with target-substrate distance
Fig. 6. Different surface contours with same roughness value. (a) Low-spatial-frequency; (b) high-spatial-frequency
Fig. 7. Surface contour structures of Mo/Si multilayer coatings measured at different pressures. (a) 0.06 Pa; (b) 0.08 Pa; (c) 0.12 Pa
Fig. 8. Surface roughness of Mo/Si multilayer coatings measured at different gas pressures. (a) Roughness; (b) power spectral density
Fig. 9. Surface contour structures of Mo/Si multilayer coatings measured at different target-substrate distances. (a) 14 cm; (b) 12 cm; (c) 10 cm
Fig. 10. Surface roughness of Mo/Si multilayer coatings measured at different target-substrate distances. (a) Roughness; (b) power spectral density
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