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    Journals >Acta Optica Sinica >Volume 40 >Issue 10 >Page 1031002 > Article
    • Acta Optica Sinica
    • Vol. 40, Issue 10, 1031002 (2020)
    Research on Surface Roughness Related Coating Processes of Mo/Si Multilayers
    Shizhuang Sun1、2, Chunshui Jin1、*, Bo Yu1、**, Tao Guo1, Shun Yao1, Chun Li1, and Wenyuan Deng1
    Author Affiliations
  • 1Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun, Jilin 130033, China
  • 2University of Chinese Academy of Sciences, Beijing 100049, China
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    DOI: 10.3788/AOS202040.1031002 Cite this Article Set citation alerts
    Shizhuang Sun, Chunshui Jin, Bo Yu, Tao Guo, Shun Yao, Chun Li, Wenyuan Deng. Research on Surface Roughness Related Coating Processes of Mo/Si Multilayers[J]. Acta Optica Sinica, 2020, 40(10): 1031002 Copy Citation Text show less
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    Article index updated: May. 24, 2024
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    Shizhuang Sun, Chunshui Jin, Bo Yu, Tao Guo, Shun Yao, Chun Li, Wenyuan Deng. Research on Surface Roughness Related Coating Processes of Mo/Si Multilayers[J]. Acta Optica Sinica, 2020, 40(10): 1031002
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