• Optics and Precision Engineering
  • Vol. 31, Issue 12, 1774 (2023)
Shenghong GE1,2, Jiwen SHEN1, and Yongbin ZENG1,*
Author Affiliations
  • 1College of Mechanical and Electrical Engineering,Nanjing University of Aeronautics and Astronautics,Nanjing2006,China
  • 2AVIC Nanjing Servo Control System Co., Ltd.Nanjing10016,China
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    DOI: 10.37188/OPE.20233112.1774 Cite this Article
    Shenghong GE, Jiwen SHEN, Yongbin ZENG. Laser-electrochemical combined machining for micro-hole arrays of safety filter[J]. Optics and Precision Engineering, 2023, 31(12): 1774 Copy Citation Text show less
    Schematic diagram of picosecond laser processing system
    Fig. 1. Schematic diagram of picosecond laser processing system
    Schematic diagram of electrochemical polishing system
    Fig. 2. Schematic diagram of electrochemical polishing system
    Inlet and outlet morphology of micro-hole under different laser processing paths
    Fig. 3. Inlet and outlet morphology of micro-hole under different laser processing paths
    Inlet and outlet diameters of micro-hole under different laser processing paths
    Fig. 4. Inlet and outlet diameters of micro-hole under different laser processing paths
    Inlet morphology and diameter of the micro-hole under different laser power rates
    Fig. 5. Inlet morphology and diameter of the micro-hole under different laser power rates
    Inlet morphology and diameter of the micro-hole under different laser cutting speeds
    Fig. 6. Inlet morphology and diameter of the micro-hole under different laser cutting speeds
    Outlet morphology and diameter of the micro-hole under different laser defocusing amounts
    Fig. 7. Outlet morphology and diameter of the micro-hole under different laser defocusing amounts
    Schematic diagram of electrochemical polishing principle
    Fig. 8. Schematic diagram of electrochemical polishing principle
    Electrochemical polishing effect of workpiece surface under different processing voltages
    Fig. 9. Electrochemical polishing effect of workpiece surface under different processing voltages
    Two-dimensional diagram of the array micro-holes of safety filter
    Fig. 10. Two-dimensional diagram of the array micro-holes of safety filter
    Array micro-holes of safety filter after laser machining
    Fig. 11. Array micro-holes of safety filter after laser machining
    Array micro-holes of safety filter after electrochemical polishing machining
    Fig. 12. Array micro-holes of safety filter after electrochemical polishing machining
    ParameterValue
    Laser power/W1.2、1.64、2.08、2.52、2.96、3.4
    Cutting speed/(mm·s-14, 6, 8, 10, 12, 14
    Defocusing amount/mm-0.15, -0.1, -0.05, 0, 0.05, 0.1
    ElectrolyteNaNO3-ethylene glycol
    Conductivity/(mS·cm-13
    Temperature/℃50
    Machining gap/mm30
    Machining Voltage/V35, 40, 45, 50, 55, 60
    Table 1. Main experimental conditions and parameters
    Shenghong GE, Jiwen SHEN, Yongbin ZENG. Laser-electrochemical combined machining for micro-hole arrays of safety filter[J]. Optics and Precision Engineering, 2023, 31(12): 1774
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