Yu SHANG, Jie FAN, Haizhu WANG, Yonggang ZOU, Xiaohui MA. Fabrication Technology of Distributed Feedback Semiconductor Laser Based on Buried Metal Mask[J]. Acta Photonica Sinica, 2022, 51(9): 0914005
- Acta Photonica Sinica
- Vol. 51, Issue 9, 0914005 (2022)
Fig. 1. Preparation process scheme of DFB semiconductor laser based on buried metal mask
Fig. 2. Top view of etched grating
Fig. 3. View of BM-DFB
Fig. 4. Spectra of BM-DFB and PM-DFB
Fig. 5. P-I-V curves of BM-DFB and PM-DFB
Fig. 6. Far field spot pattern of BM-DFB and PM-DFB
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