• Chinese Optics Letters
  • Vol. 16, Issue 8, 081203 (2018)
Lei Zhang1、*, Sheng Zhou1, Dong Li2, Jingsong Li1, and Benli Yu1
Author Affiliations
  • 1Key Laboratory of Opto-Electronic Information Acquisition and Manipulation, Ministry of Education, Anhui University, Hefei 230601, China
  • 2Research Center of Laser Fusion, China Academy of Engineering Physics, Mianyang 621900, China
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    DOI: 10.3788/COL201816.081203 Cite this Article Set citation alerts
    Lei Zhang, Sheng Zhou, Dong Li, Jingsong Li, Benli Yu. Model-based adaptive non-null interferometry for freeform surface metrology[J]. Chinese Optics Letters, 2018, 16(8): 081203 Copy Citation Text show less
    System layout and principle of the flexible MANI.
    Fig. 1. System layout and principle of the flexible MANI.
    Experiment layout.
    Fig. 2. Experiment layout.
    Aberration compensation of the tested surface. (a) The optimal interferogram by transmission sphere, (b) the interferogram compensated by PNL in the experiment, and (c) the interferogram compensated by DM in the experiment.
    Fig. 3. Aberration compensation of the tested surface. (a) The optimal interferogram by transmission sphere, (b) the interferogram compensated by PNL in the experiment, and (c) the interferogram compensated by DM in the experiment.
    (a) The three DM surface figures and (b) the corresponding interferograms after DM compensation in the experiment.
    Fig. 4. (a) The three DM surface figures and (b) the corresponding interferograms after DM compensation in the experiment.
    Result of MCRT algorithm. (a) The initial interferograms after DM compensation in the system model, (b) the interferograms after the MCRT algorithm in the system model, and (c) the map of surface figure error.
    Fig. 5. Result of MCRT algorithm. (a) The initial interferograms after DM compensation in the system model, (b) the interferograms after the MCRT algorithm in the system model, and (c) the map of surface figure error.
    Test results of the paraboloidal surface, where (a) is the initial interferogram in the experiment, (b) is the interferogram after DM compensation in the experiment, (c) is the interferogram in the model after compensation and the MCRT algorithm, (d) is the surface figure error map in actual MANI flip-angle imaging (AFI), (e) is the figure map from the Zygo interferometer, and (f) is the error map between (d) and (e).
    Fig. 6. Test results of the paraboloidal surface, where (a) is the initial interferogram in the experiment, (b) is the interferogram after DM compensation in the experiment, (c) is the interferogram in the model after compensation and the MCRT algorithm, (d) is the surface figure error map in actual MANI flip-angle imaging (AFI), (e) is the figure map from the Zygo interferometer, and (f) is the error map between (d) and (e).
    Lei Zhang, Sheng Zhou, Dong Li, Jingsong Li, Benli Yu. Model-based adaptive non-null interferometry for freeform surface metrology[J]. Chinese Optics Letters, 2018, 16(8): 081203
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