Model-based adaptive non-null interferometry for freeform surface metrology

Lei Zhang; Sheng Zhou; Dong Li; Jingsong Li; Benli Yu

doi:10.3788/COL201816.081203

Journals >Chinese Optics Letters >Volume 16 >Issue 8 >Page 081203 > Article

Chinese Optics Letters
Vol. 16, Issue 8, 081203 (2018)

Model-based adaptive non-null interferometry for freeform surface metrology

Lei Zhang^1、*, Sheng Zhou¹, Dong Li², Jingsong Li¹, and Benli Yu¹

Author Affiliations

¹Key Laboratory of Opto-Electronic Information Acquisition and Manipulation, Ministry of Education, Anhui University, Hefei 230601, China

²Research Center of Laser Fusion, China Academy of Engineering Physics, Mianyang 621900, China

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DOI: 10.3788/COL201816.081203 Cite this Article Set citation alerts

Lei Zhang, Sheng Zhou, Dong Li, Jingsong Li, Benli Yu. Model-based adaptive non-null interferometry for freeform surface metrology[J]. Chinese Optics Letters, 2018, 16(8): 081203 Copy Citation Text

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Lei Zhang, Sheng Zhou, Dong Li, Jingsong Li, Benli Yu. Model-based adaptive non-null interferometry for freeform surface metrology[J]. Chinese Optics Letters, 2018, 16(8): 081203

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