Lingmao Xu, Jizhou Wang, Maojin Dong, Duoshu Wang, Yudong Feng. Theoretical study of the thickness uniformity of a coating on the inner face of a parabolic substrate in a vacuum evaporation system[J]. Chinese Optics Letters, 2015, 13(Suppl.): S22201
- Chinese Optics Letters
- Vol. 13, Issue Suppl., S22201 (2015)
Fig. 1. Configuration of source-substrate system in the film growth on parabolic substrate.
Fig. 2. Coated arc of the circle x 2 + y 2 = p h − p z
Fig. 3. With L / h = 2 n / h
Fig. 4. Impact of L / h n / h = 1
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