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    Journals >Acta Optica Sinica >Volume 33 >Issue 9 >Page 922001 > Article
    • Acta Optica Sinica
    • Vol. 33, Issue 9, 922001 (2013)
    Analysis of Mid-Spatial Frequency Surface Errors Effects on Local Flare in Lithographic Projection Lens
    Yang Wang1、2、*, Huang Wei1, Xu Weicai1, and Shang Hongbo1
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  • 2[in Chinese]
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    DOI: 10.3788/aos201333.0922001 Cite this Article Set citation alerts
    Yang Wang, Huang Wei, Xu Weicai, Shang Hongbo. Analysis of Mid-Spatial Frequency Surface Errors Effects on Local Flare in Lithographic Projection Lens[J]. Acta Optica Sinica, 2013, 33(9): 922001 Copy Citation Text show less
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    Article index updated: May. 24, 2024
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    Yang Wang, Huang Wei, Xu Weicai, Shang Hongbo. Analysis of Mid-Spatial Frequency Surface Errors Effects on Local Flare in Lithographic Projection Lens[J]. Acta Optica Sinica, 2013, 33(9): 922001
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