Preparation of Anti-Reflection Coatings on Quartz Tube Surfaces Based on Atomic Layer Deposition

Wen Mu; Weidong Shen; Chenying Yang; Xiaowen Zheng; Zhen Wang; Huaxin Yuan; Wenjia Yuan; Yueguang Zhang

doi:10.3788/AOS201939.0324001

Journals >Acta Optica Sinica >Volume 39 >Issue 3 >Page 0324001 > Article

Acta Optica Sinica
Vol. 39, Issue 3, 0324001 (2019)

Preparation of Anti-Reflection Coatings on Quartz Tube Surfaces Based on Atomic Layer Deposition

Wen Mu, Weidong Shen^*, Chenying Yang, Xiaowen Zheng, Zhen Wang, Huaxin Yuan, Wenjia Yuan, and Yueguang Zhang

Author Affiliations

State Key Laboratory of Modern Optical Instrumentation, College of Optical Science and Engineering, Zhejiang University, Hangzhou, Zhejiang 310027, China

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DOI: 10.3788/AOS201939.0324001 Cite this Article Set citation alerts

Wen Mu, Weidong Shen, Chenying Yang, Xiaowen Zheng, Zhen Wang, Huaxin Yuan, Wenjia Yuan, Yueguang Zhang. Preparation of Anti-Reflection Coatings on Quartz Tube Surfaces Based on Atomic Layer Deposition[J]. Acta Optica Sinica, 2019, 39(3): 0324001 Copy Citation Text

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