Preparation of Anti-Reflection Coatings on Quartz Tube Surfaces Based on Atomic Layer Deposition

Wen Mu; Weidong Shen; Chenying Yang; Xiaowen Zheng; Zhen Wang; Huaxin Yuan; Wenjia Yuan; Yueguang Zhang

doi:10.3788/AOS201939.0324001

Journals >Acta Optica Sinica >Volume 39 >Issue 3 >Page 0324001 > Article

Acta Optica Sinica
Vol. 39, Issue 3, 0324001 (2019)

Preparation of Anti-Reflection Coatings on Quartz Tube Surfaces Based on Atomic Layer Deposition

Wen Mu, Weidong Shen^*, Chenying Yang, Xiaowen Zheng, Zhen Wang, Huaxin Yuan, Wenjia Yuan, and Yueguang Zhang

Author Affiliations

State Key Laboratory of Modern Optical Instrumentation, College of Optical Science and Engineering, Zhejiang University, Hangzhou, Zhejiang 310027, China

show less

DOI: 10.3788/AOS201939.0324001 Cite this Article Set citation alerts

Wen Mu, Weidong Shen, Chenying Yang, Xiaowen Zheng, Zhen Wang, Huaxin Yuan, Wenjia Yuan, Yueguang Zhang. Preparation of Anti-Reflection Coatings on Quartz Tube Surfaces Based on Atomic Layer Deposition[J]. Acta Optica Sinica, 2019, 39(3): 0324001 Copy Citation Text

show less

Fig. 1. Schematic of quartz tube holder and various testing points on quartz tube. (a) Quartz tube holder; (b) testing points

Download full size

Fig. 2. Thickness uniformity distribution of single layer. (a) Al2O3 film; (b) TiO2 film

Download full size

$Refractive index and extinction coefficient of materials. (a) Refractive index of Al2O3; (b) refractive index and extinction coefficient of TiO2$

Fig. 3. Refractive index and extinction coefficient of materials. (a) Refractive index of Al2O3; (b) refractive index and extinction coefficient of TiO2

Download full size

Fig. 4. Experimental and simulated reflectivities of single wavelength 550 nm AR coating

Download full size

Fig. 5. Central wavelength deviations on outer surfaces of quartz tubes with different outer diameters. (a) Circumferential direction of outer surface; (b) axial direction of outer surface

Download full size

Fig. 6. Central wavelength deviations on inner surfaces of quartz tubes with different inner diameters. (a) Circumferential direction of inner surface; (b) axial direction of inner surface

Download full size

Fig. 7. Axial central wavelength deviations on inner and outer surfaces of quartz tubes with different lengths. (a) Axial direction of inner surface; (b) axial direction of outer surface

Download full size

Fig. 8. Central wavelength distributions of quartz tube with outer diameter of 40 mm, inner diameter of 37 mm, and length of 50 mm. (a) Outer surface; (b) inner surface

Download full size

Material	Substrate temperature /℃	First reactant(pulse time)	Purge gas(purge time)	Second reactant (pulse time)	Purge gas(purge time)
TiO₂	120	TiCl₄(0.35 s)	N₂(6 s)	H₂O(0.3 s)	N₂(8 s)
Al₂O₃	120	TMA(0.50 s)	N₂(6 s)	H₂O(0.3 s)	N₂(8 s)

Table 1. Process parameters for preparation of Al2O3 and TiO2 based on ALD technology

Experimental group	Outer diameter/mm	Inner diameter/mm	Length/mm
	23	20	20
1	26	20	20
	30	20	20
	40	37	20
2	40	34	20
	40	30	20
	40	34	30
3	40	34	40
	40	34	50

Table 2. Quartz tube size

Outer diameter /mm	Circumferential non-uniformity /%	Axial non-uniformity /%	Total non-uniformity /%	Total non-uniformity except ±150° /%	Total averagecenter wavelength /nm
23	1.00	0.27	1.97	1.69	547
26	1.13	0.50	1.73	1.04	549
30	1.18	0.36	1.91	1.50	549

Table 3. Non-uniformity on outer surfaces of quartz tubes with different outer diameters

Inner diameter /mm	Circumferential non-uniformity /%	Axial non-uniformity /%	Total non-uniformity /%	Total averagecenter wavelength /nm
37	0.68	0.68	1.59	551
34	0.36	0.72	1.49	552
30	0.49	0.59	1.26	553

Table 4. Non-uniformity on inner surfaces of quartz tubes with different inner diameters

Position	Length /mm	Circumferential non-uniformity /%	Axial non-uniformity /%	Total non-uniformity /%	Total averagecenter wavelength /nm
	30	0.78	0.78	1.10	543
Inner surface	40	0.37	0.83	1.48	542
	50	0.50	0.64	1.42	544
	30	0.83	0.64	1.29	544
Outer surface	40	0.46	0.27	1.47	546
	50	0.69	0.60	1.65	544

Table 5. Uniformity of inner and outer surfaces of quartz tubes with different lengths

Download Citation

Set citation alerts for the article

Tools

Set citation alerts for the article

Save the article for my favorites

Paper Information