[1] Chen Q L, Chen Q L, Ferraris M. Study on thermal assisted direct bonding of glasses for lab-on-chip application through surface activation process[J]. Advanced Materials Research, 327, 124-129(2011).
[2] Berthold A, Nicola L, Sarro P et al. Glass-to-glass anodic bonding with standard IC technology thin films as intermediate layers[J]. Sensors and Actuators A: Physical, 82, 224-228(2000).
[4] Okada H, Kaneuchi T, Takagi H et al. Effect of glass materials on joints in anodic bonding of glass to silicon[J]. Journal of the Japan Institute of Metals, 73, 110-115(2009).
[5] Haisma J. Spierings G A C M. Contact bonding, including direct-bonding in a historical and recent context of materials science and technology, physics and chemistry: historical review in a broader scope and comparative outlook[J]. Materials Science and Engineering: R: Reports, 37, 1-60(2002).
[6] Haisma J, Hattu N. Pulles J T C M D, et al. Direct bonding and beyond[J]. Applied Optics, 46, 6793-6803(2007).
[7] Gattass R R, Mazur E. Femtosecond laser micromachining in transparent materials[J]. Nature Photonics, 2, 219-225(2008).
[8] Itoh K, Takayuki T. Ultrafast laser microwelding for transparent and heterogeneous materials[J]. Proceedings of SPIE, 6881, 68810V(2008).
[9] Itoh K, Watanabe W, Nolte S et al. Ultrafast processes for bulk modification of transparent materials[J]. MRS Bulletin, 31, 620-625(2006).
[10] Miyamoto I, Cvecek K, Schmidt M. Evaluation of nonlinear absorptivity in internal modification of bulk glass by ultrashort laser pulses[J]. Optics Express, 19, 10714-10727(2011).
[11] Watanabe W, Li Y, Itoh K. Ultrafast laser micro-processing of transparent material[J]. Optics & Laser Technology, 78, 52-61(2016).
[12] Richter S, Zimmermann F, Tünnermann A et al. Laser welding of glasses at high repetition rates-fundamentals and prospects[J]. Optics & Laser Technology, 83, 59-66(2016).
[14] Kongsuwan P, Satoh G, Yao Y L. Transmission welding of glass by femtosecond laser: mechanism and fracture strength[J]. Journal of Manufacturing Science and Engineering, 134, 011004(2012).
[15] Tamaki T, Watanabe W, Nishii J et al. Welding of transparent materials using femtosecond laser pulses[J]. Japanese Journal of Applied Physics, 44, L687-L689(2005).
[16] Tamaki T, Watanabe W, Itoh K. Laser micro-welding of transparent materials by a localized heat accumulation effect using a femtosecond fiber laser at 1558 nm[J]. Optics Express, 14, 10460-10468(2006).
[20] Zimmermann F, Richter S, Döring S et al. Ultrastable bonding of glass with femtosecond laser bursts[J]. Applied Optics, 52, 1149-1154(2013).
[21] Cvecek K, Odato R, Dehmel S et al. Gap bridging in joining of glass using ultra short laser pulses[J]. Optics Express, 23, 5681-5693(2015).
[23] Richter S, Zimmermann F, Eberhardt R et al. Toward laser welding of glasses without optical contacting[J]. Applied Physics A, 121, 1-9(2015).
[24] Chen J Y, Carter R M, Thomson R R et al. Avoiding the requirement for pre-existing optical contact during picosecond laser glass-to-glass welding[J]. Optics Express, 23, 18645-18657(2015).
[25] Sugioka K, Iida M, Takai H et al. Efficient microwelding of glass substrates by ultrafast laser irradiation using a double-pulse train[J]. Optics Letters, 36, 2734-2736(2011).
[26] Zhang G D, Stoian R, Zhao W et al. Femtosecond laser Bessel beam welding of transparent to non-transparent materials with large focal-position tolerant zone[J]. Optics Express, 26, 917-926(2018).
[27] Ozturk K, Basu R, Randall C et al. Diffusion bonding of rigid zirconia pieces using electrophoretically deposited particulate interlayers[J]. Scripta Materialia, 41, 1191-1195(1999).
[28] Cross T H, Mayo M J. Ceramic-ceramic diffusion bonding using nanocrystalline interlayers[J]. Nanostructured Materials, 3, 163-168(1993).
[29] Muto H, Matsuda A, Sakai M. Superplastic joining of 3Y-TZP[J]. Journal of the European Ceramic Society, 26, 379-384(2006).
[30] Gutierrez-Mora F, Goretta K C, Chen N et al. Joining advanced ceramics by plastic flow[J]. Ceramics International, 30, 1945-1948(2004).
[31] Itoh K, Ozeki Y. Novel processes in laser microfabrication and microjoining. [C]∥29th International Congress on Applications of Lasers and Electro-Optics, ICALEO 2010, October 11-14, 2010, Anaheim, California, USA., 103, 1064-1068(2010).
[32] Penilla E H. Devia-Cruz L F, Wieg A T, et al. Ultrafast laser welding of ceramics[J]. Science, 365, 803-808(2019).
[33] Zhang G D, Bai J, Zhao W et al. Interface modification based ultrashort laser microwelding between SiC and fused silica[J]. Optics Express, 25, 1702-1709(2017).
[34] Nordin I H W, Okamoto Y, Okada A et al. Effect of wavelength and pulse duration on laser micro-welding of monocrystalline silicon and glass[J]. Applied Physics A, 122, 400-407(2016).
[35] Nordin I W, Okamoto Y, Miyamoto I et al. Evaluation of molten area in micro-welding of monocrystalline silicon and glass[J]. IOP Conference Series: Materials Science and Engineering, 114, 012039(2016).
[36] Volpe A, di Niso F, Gaudiuso C et al. Welding of PMMA by a femtosecond fiber laser[J]. Optics Express, 23, 4114-4124(2015).
[37] Volpe A, Niso F D, Gaudiuso C et al. Femtosecond fiber laser welding of PMMA[J]. Proceedings of SPIE, 9351, 935106(2015).
[38] Mizuguchi Y, Tamaki T, Fukuda T et al. Dendrite-joining of air-gap-separated PMMA substrates using ultrashort laser pulses[J]. Optical Materials Express, 7, 2141-2149(2017).
[39] Nunes P S, Ohlsson P D, Ordeig O et al. Cyclic olefin polymers: emerging materials for lab-on-a-chip applications[J]. Microfluidics and Nanofluidics, 9, 145-161(2010).
[40] Roth G L, Rung S, Hellmann R. Welding of transparent polymers using femtosecond laser[J]. Applied Physics A, 122, 86(2016).
[41] Roth G L, Rung S, Hellmann R. Ultrashort pulse laser micro-welding of cyclo-olefin copolymers[J]. Optics and Lasers in Engineering, 93, 178-181(2017).
[43] Roth G L, Esen C, Hellmann R. A new approach to seal polymer microfluidic devices using ultrashort laser pulses[J]. Journal of Laser Micro Nanoengineering, 14, 49-53(2019).
[44] Jonušauskas L, Rekštyt S, Buividas R et al. Hybrid subtractive-additive-welding microfabrication for lab-on-chip applications via single amplified femtosecond laser source[J]. Optical Engineering, 56, 094108(2017).