• Laser & Optoelectronics Progress
  • Vol. 53, Issue 7, 70603 (2016)
Huang Meihong1、*, Wang Jufeng2, and Zhuang Qiren2
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
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    DOI: 10.3788/lop53.070603 Cite this Article Set citation alerts
    Huang Meihong, Wang Jufeng, Zhuang Qiren. Study of Magnetic Torsion Micro-Mirror Fiber Current Sensors with Composite Structure[J]. Laser & Optoelectronics Progress, 2016, 53(7): 70603 Copy Citation Text show less
    References

    [1] Lenz J E. A review of magnetic sensors[J]. Proceedings of the IEEE, 1990, 78(6): 973-989.

    [2] Goel M. Recent developments in electroceramics: MEMS applications for energy and environment[J]. Ceramics International, 2004, 30(7): 1147-1154.

    [3] Panas R M, Cullinan M A, Culpepper M L. Design of piezoresistive-based MEMS sensor systems for precision microsystems[J]. Precision Engineering, 2012, 36 (1): 44-54.

    [4] Khoshnoud F, de Silva C W. Recent advances in MEMS sensor technology-mechanical applications[J]. Instrumentation & Measurement Magazine, IEEE, 2012, 15(2): 14-24.

    [5] Eyre B, Pister K S J, Kaiser W. Resonant mechanical magnetic sensor in standard CMOS[J]. IEEE Electron Device Letters, 1998, 19(12): 496-498.

    [6] Heredero R L, Santos J L, de Caleya R F, et al.. Micromachined low-finesse Fabry-Perot interferometer for the measurement of DC and AC electrical currents[J]. IEEE Sensors Journal, 2003, 3(l): 13-18.

    [7] Zhao Bengang, Liu Yufei, Xu Jing, et al.. Design of novel optical current sensor based on MEMS[J]. Semiconductor Optoelectronics, 2006, 27(5): 534-538.

    [8] Du G T, Chen X D, Lin Q B. Micromechanical magnetic sensor based on cylindrical ferromagnets[J]. IEEE Sensor Journal, 2011, 11(11): 2973-2979.

    [9] Du G T, Chen X D. MEMS magnetometer based on magnetorheological elastomer[J]. Measurement, 2012, 45(1): 54-58.

    [10] Long Liang, Zhong Shaolong, Xu Jing, et al.. Design and fabrication of mirco fiber-optic magnetic sensor[J]. Optics and Precision Engineering, 2013, 21(9): 2294-2302.

    [11] Wang Jufeng, Huang Meihong, Zhuang Linling, et al.. Characteristics of MEMS torsion micro-mirror current sensor based on polymer material[J]. Journal of Optoelectronics·Laser, 2015, 26(3): 450-456.

    [12] Li Jianshu, Zhong Xianxin. Analysis on four-terminal optical fiber compensation network[J]. Acta Photonica Sinica, 1998, 27(10): 923-928.

    [13] Peng Huan. Research on reflected fiber distance sensor with single mode illumination[D]. Harbin: Harbin Engineering University, 2012: 4-6.

    [14] Zhang X M, Chau F S, Quan C, et al.. A study of the static characteristics of a torsional micromirror[J]. Sensors and Actuators A: Physical, 2001, 90(1-2): 73-81.

    [15] Asada N, Takeuchi M, Vaganov V, et al.. Silicon micro-optical scanner[J]. Sensor and Actuators A: Physical, 2000, 83(1): 284-290.

    [16] Gilsdorf R W, Palais J C. Single-mode fiber coupling efficiency with graded-index rod lenses[J]. Applied Optics, 1994, 33(16): 3440-3445.

    Huang Meihong, Wang Jufeng, Zhuang Qiren. Study of Magnetic Torsion Micro-Mirror Fiber Current Sensors with Composite Structure[J]. Laser & Optoelectronics Progress, 2016, 53(7): 70603
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