• Laser & Optoelectronics Progress
  • Vol. 53, Issue 7, 70603 (2016)
Huang Meihong1、*, Wang Jufeng2, and Zhuang Qiren2
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
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    DOI: 10.3788/lop53.070603 Cite this Article Set citation alerts
    Huang Meihong, Wang Jufeng, Zhuang Qiren. Study of Magnetic Torsion Micro-Mirror Fiber Current Sensors with Composite Structure[J]. Laser & Optoelectronics Progress, 2016, 53(7): 70603 Copy Citation Text show less

    Abstract

    A MEMS (micro-electro-mechanical system) magnetic torsion micro-mirror fiber current sensor with composite structure is proposed. The sensor part is composed of a magnetic torsion mirror and a dual-fiber collimator. The structure of MEMS magnetic torsion micro-mirror and the principle of current sensor are introduced. Analysis based on the current sensor model shows that by choosing suitable distance between the collimator and the micro-mirror, signal distortion can be avoided. When the peak-to-peak value of normalized intensity is taken as the output signal of alternating current measurement, the measurement sensitivity changes with the measured value of electric current. When the measured current approaches 0, the sensitivity also approaches 0. Thus, one linear correction processing method for normalized intensity signal is proposed. With this method, a good linear response curve is obtained, and the current measurement sensitivity is not distorted by the current change. Finally, the correctness of theoretical analysis and simulation results are testified by experiments, from which the linear response sensitivity of normalized intensity reaches around 0.034/A.
    Huang Meihong, Wang Jufeng, Zhuang Qiren. Study of Magnetic Torsion Micro-Mirror Fiber Current Sensors with Composite Structure[J]. Laser & Optoelectronics Progress, 2016, 53(7): 70603
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