• Infrared and Laser Engineering
  • Vol. 51, Issue 5, 20210332 (2022)
Ming Li1、2、3, Yaobin Li1、2、3, Pingping Qiu1、2、3, Weinian Yan1、2、3, Ruiwen Jia1、2、3, and Qiang Kan1、2、3、*
Author Affiliations
  • 1Key Laboratory of Semiconductor Materials Science, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China
  • 2Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
  • 3Beijing Key Laboratory of Low Dimensional Semiconductor Materials and Devices, Beijing 100083, China
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    DOI: 10.3788/IRLA20210332 Cite this Article
    Ming Li, Yaobin Li, Pingping Qiu, Weinian Yan, Ruiwen Jia, Qiang Kan. Polarization characteristics of surface grating vertical cavity surface emitting laser[J]. Infrared and Laser Engineering, 2022, 51(5): 20210332 Copy Citation Text show less
    Cross-section schematic diagram of the surface grating VCSEL
    Fig. 1. Cross-section schematic diagram of the surface grating VCSEL
    SEM images of the surface grating, which with a period of 700 nm, a duty cycle of 0.5, and an etching depth of about 60 nm. The diameter of the grating area is 5 μm
    Fig. 2. SEM images of the surface grating, which with a period of 700 nm, a duty cycle of 0.5, and an etching depth of about 60 nm. The diameter of the grating area is 5 μm
    Mirror loss varies with the etching depth of the grating
    Fig. 3. Mirror loss varies with the etching depth of the grating
    Polarization test system
    Fig. 4. Polarization test system
    Polarization-resolved light-current characteristics of ordinary VCSEL
    Fig. 5. Polarization-resolved light-current characteristics of ordinary VCSEL
    (a) Far-field characteristics, (b) Polarization-resolved P-I curve, (c) Polarization-resolved spectrum, and (d) The distribution of polarization states in the polar coordinate plane of the basic transverse mode surface grating VCSEL
    Fig. 6. (a) Far-field characteristics, (b) Polarization-resolved P-I curve, (c) Polarization-resolved spectrum, and (d) The distribution of polarization states in the polar coordinate plane of the basic transverse mode surface grating VCSEL
    (a) Polarization-resolved P-I curve, (b) Polarization-resolved spectrum, and (c) Distribution of polarization states in the polar coordinate plane of a multi-transverse mode surface grating VCSEL
    Fig. 7. (a) Polarization-resolved P-I curve, (b) Polarization-resolved spectrum, and (c) Distribution of polarization states in the polar coordinate plane of a multi-transverse mode surface grating VCSEL
    Polarization-resolved P-I curves of surface grating VCSELs in different directions
    Fig. 8. Polarization-resolved P-I curves of surface grating VCSELs in different directions
    Ming Li, Yaobin Li, Pingping Qiu, Weinian Yan, Ruiwen Jia, Qiang Kan. Polarization characteristics of surface grating vertical cavity surface emitting laser[J]. Infrared and Laser Engineering, 2022, 51(5): 20210332
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