• Infrared and Laser Engineering
  • Vol. 51, Issue 5, 20210332 (2022)
Ming Li1、2、3, Yaobin Li1、2、3, Pingping Qiu1、2、3, Weinian Yan1、2、3, Ruiwen Jia1、2、3, and Qiang Kan1、2、3、*
Author Affiliations
  • 1Key Laboratory of Semiconductor Materials Science, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China
  • 2Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
  • 3Beijing Key Laboratory of Low Dimensional Semiconductor Materials and Devices, Beijing 100083, China
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    DOI: 10.3788/IRLA20210332 Cite this Article
    Ming Li, Yaobin Li, Pingping Qiu, Weinian Yan, Ruiwen Jia, Qiang Kan. Polarization characteristics of surface grating vertical cavity surface emitting laser[J]. Infrared and Laser Engineering, 2022, 51(5): 20210332 Copy Citation Text show less

    Abstract

    The polarization control of vertical cavity surface emitting laser (VCSEL) with surface grating structure was studied. After introducing the surface grating, the polarization-dependent mirror loss under different etching depths was simulated. The results show that the etching depth of the surface grating can achieve stable polarization in the range of 44 nm to 130 nm, which has a large fabrication tolerance. For the fundamental transverse mode, the orthogonal polarization suppression ratio (OPSR) of the surface grating VCSEL is more than 20 dB, and the peak-to-peak OPSR of the polarization-resolved spectrum reaches 40 dB. Effective polarization control can also be achieved even for multimode VCSEL. In order to further verify the effect of the grating on polarization control, two surface gratings with mutually perpendicular directions were fabricated. The OPSRs of the VCSEL with the two directional gratings were more than 20 dB. The test results show that surface grating is an effective means for VCSEL to achieve stable polarization.
    Ming Li, Yaobin Li, Pingping Qiu, Weinian Yan, Ruiwen Jia, Qiang Kan. Polarization characteristics of surface grating vertical cavity surface emitting laser[J]. Infrared and Laser Engineering, 2022, 51(5): 20210332
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