• Laser & Optoelectronics Progress
  • Vol. 55, Issue 2, 020004 (2018)
Yuanyuan Xu, Ke Shi, Yawei Wang*, Jingye Liu, Qiong Zhu, Mengyuan Shang, and Manying Pan
Author Affiliations
  • Faculty of Science, Jiangsu University, Zhenjiang, Jiangsu 212013, China
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    DOI: 10.3788/LOP55.020004 Cite this Article Set citation alerts
    Yuanyuan Xu, Ke Shi, Yawei Wang, Jingye Liu, Qiong Zhu, Mengyuan Shang, Manying Pan. Research Progresses of Phase-Shifting Interferometry Technology and Phase Shift Extraction Method[J]. Laser & Optoelectronics Progress, 2018, 55(2): 020004 Copy Citation Text show less

    Abstract

    Phase-shifting interferometry is an important technology in both wavefront and phase measurements by virtue of its advantages of non-invasive, no damage, high sensitivity and high speed. And phase-shifting interferometry technologies have been widely used in many fields related to the optical imaging and metrology. In this paper, according to the characteristics of the phase-shifting and optical path introduced in the imaging system, the phase-shifting interferometry technologies are classified. And the typical phase-shifting interferometry technologies in both cases of temporal and spatial domains are analyzed comparatively. Then, a lot of typical phase retrieval methods are listed, on the basis of the development of the phase-shifting interferometry technology. For the general phase-shifting interferometry technologies, typical phase shift extraction methods are classified according to the characteristic of phase shift. Then, aiming at the common problems existing in the general phase shift extraction methods, the corresponding solutions are discussed. At last, the trends of the phase-shifting interferometry technology and phase-shifting extraction method are predicted.
    Yuanyuan Xu, Ke Shi, Yawei Wang, Jingye Liu, Qiong Zhu, Mengyuan Shang, Manying Pan. Research Progresses of Phase-Shifting Interferometry Technology and Phase Shift Extraction Method[J]. Laser & Optoelectronics Progress, 2018, 55(2): 020004
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