Removal function research on the fused silica mirror with 400 mm polishing wheel of the magnetorheological finishing

Xu Wang

doi:10.3788/COL201513.S22203

Journals >Chinese Optics Letters >Volume 13 >Issue Suppl. >Page S22203 > Article

Chinese Optics Letters
Vol. 13, Issue Suppl., S22203 (2015)

Removal function research on the fused silica mirror with 400 mm polishing wheel of the magnetorheological finishing

Xu Wang

Author Affiliations

Key Laboratory of Optical System Advanced Manufacturing Technology, Changchun Institute of Optics, Fine Mechanics, and Physics, Chinese Academy of Sciences, Changchun 130033, China

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DOI: 10.3788/COL201513.S22203 Cite this Article Set citation alerts

Xu Wang. Removal function research on the fused silica mirror with 400 mm polishing wheel of the magnetorheological finishing[J]. Chinese Optics Letters, 2015, 13(Suppl.): S22203 Copy Citation Text

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Fig. 1. MRF polishing system: (a) manufacturing center MRF-2500 with the dual MRF polishing wheel; (b) picture of the 400 mm diameter MRF polishing wheel.

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Fig. 2. Removal function of different working distances: (a) 1, (b) 1.2, (c) 1.5, and (d) 2 mm.

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Fig. 3. Relationship between the removal function parameters and the working distance.

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Fig. 4. Surface map: (a) original map; (b) virtual fabrication with removal function in Fig. 2(a); (c) virtual fabrication with removal function in Fig. 2(d).

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Fig. 5. PSD analysis on Figs. 4(a)–4(c).

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Maximum Mirror Diameter	2500 mm
X Axial Length	3000 mm
Y Axial Length	3000 mm
Z1 Axial Length	800 mm
Z2 Axial Length	800 mm
A Axes Swing Range	$\pm 45^{°}$

Table 1. MRF-2500 Parameters

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Wheel Rotation Speed	$60 rev / \min$
Velocity of the Wheel	$1.256 m / \min$
MRF Volume	$1.5 L / \min$
Fabrication Time	10 s
Working Distance	1, 1.2, 1.5, and 2 mm

Table 2. Working Parameters of the 400 mm Polishing Wheel

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Working Distance (mm)	PV (μm/min)	Volume Rate ( ${mm}^{3} / \min$ )	Length (mm)	Width (mm)
1	1.745	0.251	28.9	14.4
1.2	1.596	0.180	27.1	11.8
1.5	1.286	0.121	24.3	10.4
2	1.174	0.083	23.3	9.30

Table 3. Parameters of Removal Function under Different Working Distances

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Parameter	a	b	Adjusted $R^{2}$
PV Removal Rate	1.746	−0.619	0.9436
Volume Removal Rate	0.249	−1.688	0.9938
Removal Function Length	28.678	−0.330	0.9307
Removal Function Width	13.929	−0.650	0.9155

Table 4. Fitting Parameters

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	Original Surface	Fig. 2(a)	Fig. 2(d)	Convergence Fig. 2(a)/Fig. 2(d) (%/%)
PV ( $λ$ )	4.7287	0.9724	1.020	79.44/78.43
rms ( $λ$ )	0.5513	0.014	0.024	97.46/95.65

Table 5. Surface Data Error

Xu Wang. Removal function research on the fused silica mirror with 400 mm polishing wheel of the magnetorheological finishing[J]. Chinese Optics Letters, 2015, 13(Suppl.): S22203

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