• Chinese Optics Letters
  • Vol. 21, Issue 8, 081301 (2023)
Hailong Han1、2, Xingyu Zhang1、2, You Xiao1、2, Pusheng Yuan1、2, Huiqin Yu1、2, Shuna Wang1、2, Heng Li3, Weikeng Xie3, Mingzhi Lu3, Lingyun Li1、2, Xiaoping Liu4、*, Hao Li1、2, and Lixing You1、2
Author Affiliations
  • 1State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Microsystem and Information Technology (SIMIT), Chinese Academy of Sciences (CAS), Shanghai 200050, China
  • 2CAS Center for Excellence in Superconducting Electronics (CENSE), Shanghai 200050, China
  • 3Ori-chip Optoelectronics Technology Ltd., Ningbo 315000, China
  • 4School of Physical Science and Technology, ShanghaiTech University, Shanghai 201210, China
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    DOI: 10.3788/COL202321.081301 Cite this Article Set citation alerts
    Hailong Han, Xingyu Zhang, You Xiao, Pusheng Yuan, Huiqin Yu, Shuna Wang, Heng Li, Weikeng Xie, Mingzhi Lu, Lingyun Li, Xiaoping Liu, Hao Li, Lixing You. Cryogenic thermo-optic thin-film lithium niobate modulator with an NbN superconducting heater[J]. Chinese Optics Letters, 2023, 21(8): 081301 Copy Citation Text show less
    Schematic structure of the TFLN thermo-optical modulator with an NbN superconducting heater. (a) Cross-sectional view of the waveguide and heater (the schematics are not drawn to scale); (b) SEM image of the detail of the heater.
    Fig. 1. Schematic structure of the TFLN thermo-optical modulator with an NbN superconducting heater. (a) Cross-sectional view of the waveguide and heater (the schematics are not drawn to scale); (b) SEM image of the detail of the heater.
    (a) Measured transmission of the modulator under varying applied current; (b) Current-resistance curves measured at 293 and 3.45 K, respectively.
    Fig. 2. (a) Measured transmission of the modulator under varying applied current; (b) Current-resistance curves measured at 293 and 3.45 K, respectively.
    (a) Time response of the TFLN thermo-optical modulator with an NbN superconducting heater at 293 and 3.45 K, respectively; (b) details of the time response; the red curve is the waveform measured at 293 K, and the blue curve is the waveform measured at 3.45 K.
    Fig. 3. (a) Time response of the TFLN thermo-optical modulator with an NbN superconducting heater at 293 and 3.45 K, respectively; (b) details of the time response; the red curve is the waveform measured at 293 K, and the blue curve is the waveform measured at 3.45 K.
    Measured transmission spectra of the device under zero bias at 293 and 3.45 K, respectively.
    Fig. 4. Measured transmission spectra of the device under zero bias at 293 and 3.45 K, respectively.
    Hailong Han, Xingyu Zhang, You Xiao, Pusheng Yuan, Huiqin Yu, Shuna Wang, Heng Li, Weikeng Xie, Mingzhi Lu, Lingyun Li, Xiaoping Liu, Hao Li, Lixing You. Cryogenic thermo-optic thin-film lithium niobate modulator with an NbN superconducting heater[J]. Chinese Optics Letters, 2023, 21(8): 081301
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