Design of an automatic focusing system for 3-D topography measurement

[in Chinese]; [in Chinese]; [in Chinese]

Journals >Opto-Electronic Engineering >Volume 31 >Issue 3 >Page 56 > Article

Opto-Electronic Engineering
Vol. 31, Issue 3, 56 (2004)

Design of an automatic focusing system for 3-D topography measurement

[in Chinese]¹, [in Chinese]², and [in Chinese]¹

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¹[in Chinese]

²[in Chinese]

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[in Chinese], [in Chinese], [in Chinese]. Design of an automatic focusing system for 3-D topography measurement[J]. Opto-Electronic Engineering, 2004, 31(3): 56 Copy Citation Text

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Abstract

[in Chinese], [in Chinese], [in Chinese]. Design of an automatic focusing system for 3-D topography measurement[J]. Opto-Electronic Engineering, 2004, 31(3): 56

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