• Journal of Infrared and Millimeter Waves
  • Vol. 36, Issue 5, 543 (2017)
LIU Qiang1、2, CAI Jian-Hui1、2, HE Jia-Zhu3, WANG Yi-Ze2, ZHANG Dong-Liang2, LIU Chang2, REN Wei1, YU Wen-Jie2, LIU Xin-Ke3, and ZHAO Qing-Tai4
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
  • 4[in Chinese]
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    DOI: 10.11972/j.issn.1001-9014.2017.05.06 Cite this Article
    LIU Qiang, CAI Jian-Hui, HE Jia-Zhu, WANG Yi-Ze, ZHANG Dong-Liang, LIU Chang, REN Wei, YU Wen-Jie, LIU Xin-Ke, ZHAO Qing-Tai. 86 mV/dec subthreshold swing of back-gated MoS2 FET on SiO2[J]. Journal of Infrared and Millimeter Waves, 2017, 36(5): 543 Copy Citation Text show less

    Abstract

    Back-gated (BG) Multi-layer MoS2 field effect transistors (FETs) have been fabricated on SiO2/Si(P++) substrate and electrically characterized. By optimizing the fabrication process and scaling down the SiO2 thickness to 10 nm, the device exhibit excellent switching performance with a subthreshold swing of 86 mV/dec and an Ion/Ioff ratio ~107. The little hysteresis and small SS jointly suggest tiny magnitude of interface traps or attached oxidants. The noise current induced by gate leakage can affect the measured switch ratio by overwhelming the effective Ioff current defined by VDS. According to the behaviors of MoS2 FETs expressed by this work and others’, BG devices with SiO2 insulator present good performance and valuable potentials underutilized for rich applications.
    LIU Qiang, CAI Jian-Hui, HE Jia-Zhu, WANG Yi-Ze, ZHANG Dong-Liang, LIU Chang, REN Wei, YU Wen-Jie, LIU Xin-Ke, ZHAO Qing-Tai. 86 mV/dec subthreshold swing of back-gated MoS2 FET on SiO2[J]. Journal of Infrared and Millimeter Waves, 2017, 36(5): 543
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