Germanium-on-silicon avalanche photodiode for 1550 nm weak light signal detection at room temperature

Yuxuan Li; Xiaobin Liu; Xuetong Li; Lanxuan Zhang; Baisong Chen; Zihao Zhi; Xueyan Li; Guowei Zhang; Peng Ye; Guanzhong Huang; Deyong He; Wei Chen; Fengli Gao; Pengfei Guo; Xianshu Luo; Guoqiang Lo; Junfeng Song

doi:10.3788/COL202220.062501

[1] P. A. Govind. Fiber-Optic Communication Systems(2002).

[2] A. N. Otte, J. Barral, B. Dolgoshein, J. Hose, M. Teshima. New results from a test of silicon photomultiplier as readout for PET. Nuclear Science Symposium/Medical Imaging Conference, 3738(2004).

[3] S. Cova, M. Ghioni, I. Rech, F. Zappa. Evolution and prospects for single-photon avalanche diodes and quenching circuits. J. Mod. Opt., 51, 1267(2003).

[4] H. Chen, P. Verheyen, P. D. Heyn, G. Lepage, J. V. Campenhout. −1 V bias 67 GHz bandwidth Si-contacted germanium waveguide p-i-n photodetector for optical links at 56 Gbps and beyond. Opt. Express, 24, 4622(2016).

[5] H. -T. Chen, P. Verheyen, M. Rakowski, P. D. Heyn, G. Lepage, J. D. Coster, P. Absil, G. Roelkens, J. V. Campenhout. High-responsivity low-voltage 28-Gb/s Ge p-i-n photodetector with silicon contacts. J. Lightwave Technol., 33, 820(2015).

[6] Y.-X. Li, X.-B. Liu, X.-T. Li, G.-Q. Lo, J.-F. Song. Surface illuminated interdigitated Ge-on-Si photodetector with high responsivity. Opt. Express, 29, 16346(2021).

[7] N. Duan, T.-Y. Liow, A. E.-J. Lim, L. Ding, G.-Q. Lo. 310 GHz gain-bandwidth product Ge/Si avalanche photodetector for 1550 nm light detection. Opt. Express, 20,, 11031(2012).

[8] X. -G. Zeng, Z. -H. Huang, B. -H. Wang, M. Fiorentino, R. G. Beausoleil. Silicon–germanium avalanche photodiodes with direct control of electric field in charge multiplication region. Optica, 6, 772(2019).

[9] Z.-H. Huang, C. Li, D. Liang, K.-Z Yu, S. Palermo, R. G. Beausoleil. 25 Gbps low-voltage waveguide Si–Ge avalanche photodiode. Optica, 3, 793(2016).

[10] N. J. D. Martinez, C. T. Derose, R. W. Brock, A. L. Starbuck, A. T. Pomerene, A. L. Lentine, D. C. Trotter, P. S. Davids. High performance waveguide-coupled Ge-on-Si linear mode avalanche photodiodes. Opt. Express, 24, 19072(2016).

[11] S. A. Srinivasan, M. Berciano, P. S. Lardenois, M. Pantouvaki, J. Van Campenhout. 27 GHz silicon-contacted waveguide-coupled Ge/Si avalanche photodiode. J. Lightwave Technol., 38, 3044(2020).

[12] Y. Yuan, Z.-H. Huang, X.-G. Zeng, D. Liang, W. V. Sorin, M. Fiorentino, R. G. Beausoleil. High responsivity Si-Ge waveguide avalanche photodiodes enhanced by loop reflector. IEEE J. Sel. Top. Quantum Electron., 28, 3800508(2022).

[13] D. Benedikovic, L. Virot, G. Aubin, J. M. Hartmann, F. Amar, X. L. Roux, C. A. Ramos, B. Szelag, L. Vivien. Silicon-germanium avalanche receivers with fJ/bit energy consumption. IEEE J. Sel. Top. Quantum Electron., 28, 3802508(2022).

[14] Y. Li, X. Luo, G. Liang, G. Q. Lo. Demonstration of Ge/Si avalanche photodetector arrays for Lidar application. Optical Fiber Communication Conference, 1(2019).

[15] D. R. Gozzard, L. E. Roberts, J. T. Spollard, P. G. Sibley, D. A. Shaddock. Fast beam steering with an optical phased array. Opt. Lett., 45, 3793(2020).

[16] D.-W. Zhuang, L.-X. Zhang, X.-C. Han, Y.-X. Li, F.-L. Gao, J. -F. Song. Omnidirectional beam steering using aperiodic optical phased array with high error margin. Opt. Express, 26, 19154(2018).

[17] L.-X. Zhang, Y.-Z. Li, Y. Hu, Y.-B. Wang, M. Tao, B.-S. Chen, Q.-X. Na, Y.-X. Li, Z.-H. Zhi, X.-B. Liu, X.-Y. Li, F.-L. Gao, X.-S. Luo, G.-Q. Lo, J.-F. Song. Investigation and demonstration of a high-power handling and large-range steering optical phased array chip. Opt. Express, 29, 29755(2021).

[18] L.-X. Zhang, Y.-Z. Li, M. Tao, Y.-B. Wang, Y. Hu, B.-S. Chen, Y.-X. Li, G.-Q. Lo, J.-F. Song. Large-scale integrated multi-lines optical phased array chip. IEEE Photonics J., 12, 6601208(2020).

[19] F. Xu, X. Ma, Q. Zhang, H. -K. Lo, J. -W. Pan. Secure quantum key distribution with realistic devices. Rev. Mod. Phys., 92, 025002(2020).

[20] G.-W. Zhang, Y.-Y. Ding, W. Chen, F.-X. Wang, P. Ye, G.-Z. Huang, S. Wang, Z.-Q. Yin, J.-M. An, G.-C. Guo, Z.-F. Han. Polarization-insensitive interferometer based on a hybrid integrated planar light-wave circuit. Photonics Res., 9, 2176(2021).

[21] S. M. Sze, K. K. Ng. Physics of Semiconductor Devices(1981).

[22] J.-M. Liu. Photonic Devices(2005).

[23] Z. Lu, Y. Kang, H. Chong, Q. Zhou, H.-D. Liu, J. C. Campbell. Geiger-mode operation of Ge-on-Si avalanche photodiodes. IEEE J. Quantum Electron., 47, 731(2011).

[24] R. E. Warburton, G. Intermite, M. Myronov, P. Allred, D. R. Leadley, K. Gallacher, D. L. J. M. Lever, Z. Ikonic, R. W. Kelsall, E. H. Ceron, A. P. Knights, G. S. Buller. Ge-on-Si single-photon avalanche diode detectors: design, modeling, fabrication, and characterization at wavelengths 1310 and 1550 nm. IEEE Trans. Electron Devices, 60, 3807(2013).

[25] J. D. N. Martinez, G. Michael, C. T. Derose, A. L. Starbuck, P. S. Davids. Single photon detection in a waveguide-coupled Ge-on-Si lateral avalanche photodiode. Opt. Express, 25, 16130(2017).

[26] P. Vines, K. Kuzmenko, J. Kirdoda, D. C. S. Dumas, D. J. Paul, G. S. Buller. High performance planar germanium-on-silicon single-photon avalanche diode detectors. Nat. Commun., 10, 1086(2019).

[27] L. F. Llin, J. Kirdoda, F. Thorburn, L. L. Huddleston, Z. M. Greener, K. Kuzmenko, P. Vines, D. C. S. Dumas, R. W. Millar, G. S. Buller, D. J. Paul. High sensitivity Ge-on-Si single-photon avalanche diode detectors. Opt. Lett., 45, 6406(2020).

[28] F. Thorburn, X. Yi, Z. M. Greener, Z. M. Greener, J. Kirdoda, R. W. Millar, L. L. Huddleston, D. J. Paul, G. S. Buller. Ge-on-Si single-photon avalanche diode detectors for short-wave infrared wavelengths. J. Phys. Photonics, 4, 012001(2022).

[29] S.-Y. Ke, S.-M. Lin, D.-F. Mao, Y.-J. Ye, X.-L. Ji, W. Huang, C. Li, S.-Y. Chen. Design of wafer-bonded structures for near room temperature Geiger-mode operation of germanium on silicon single-photon avalanche photodiode. Appl. Opt., 56, 4646(2017).

[30] Y. Kang, H. X. Lu, Y.-H. Lo. Dark count probability and quantum efficiency of avalanche photodiodes for single-photon detection. Appl. Phys. Lett., 83, 2955(2003).

[31] A. Tomita, K. Nakamura. Balanced, gated-mode photon detector for quantum-bit discrimination at 1550 nm. Opt. Lett., 27, 1827(2002).

[32] C. Park, S. B. Cho, C. Y. Park, S. Baek, S. K. Han. Dual anode single-photon avalanche diode for high-speed and low-noise Geiger-mode operation. Opt. Express, 27, 18201(2019).

Data from CrossRef