[1] Wu C M, Su C S. Nonlinearity in measurement of length by optical interferometry[J]. Meas Sci Technol, 1996, 7(1): 62-68.

[2] Hou W M, Zhao X B. Drift of nonlinearity in the heterodyne interferometer[J]. Precision Engineering, 1994, 16(1): 25-35.

[3] Lin Haoshan, Chen Juke, Li Yuhe, et al.. Error analysis of optical frequency mixing on detecting device for superfinish surface scratch[J]. Laser & Optoelectronics Progress, 2015, 52(2): 021203.

[4] Chen Hongfang, Ding Xuemei, Zhong Zhi, et al.. Effect of nonlinearity by the rotation of the polarizer in laser heterodyne interferometric[J]. Chinese J Lasers, 2005, 32(9): 1281-1285.

[5] Zhong Chaoyang, Hou Wenmei, Ju Aisong, et al.. Analysis of frequency mixing in dual-frequency interferometer[J]. Optical Technique, 2015, 41(2): 119-123.

[6] Hou W M. Optical parts and the nonlinearity in heterodyne interferometers[J]. Precision Engineering, 2006, 30(3): 337-346.

[7] Hou Wenmei, Zhang Yunbo, Xu Qixin. Effect of beam splitter on nonlinearity in heterodyne interferometers[J].Chinese Journal of Mechanical Engineering, 2008, 44(9): 163-168.

[8] Peng Shijun, Miao Erlong. Sub-micron precision measurement of radius of curvature and uncertainties analysis[J]. Acta Optica Sinica, 2014, 34(5): 0512001.

[9] Deng Yuanlong, Li Xuejin, Geng Youfu, et al.. Influence of nonpolarizing beam splitters on nonlinear error in heterodyne interferometers[J]. Acta Optica Sinica, 2012, 32(11): 1112008.

[10] Richard K L, James C, Claudiu Giusca, et al.. Advances in engineering nanometrology at the national physical laboratory[J]. Meas Sci Technol, 2012, 23(7): 074002.

[11] Joo K N, Ellis J D, Buise E S, et al.. High resolution heterodyne interferometer without detectable periodic nonlinearity[J]. Opt Express, 2010, 18(2): 1159-1165.

[12] Hou W M, Zhang Y B, Hu H J. A simple technique for eliminating the nonlinearity of a heterodyne interferometer[J]. Meas Sci Technol, 2009, 20(10): 105303.

[13] Liu Binbin, Yuan Yonggui, Wang Xinxing, et al.. Real-time nonlinearity error correction method of polarizing laser interferometer[J]. Acta Optica Sinca, 2010, 30(9): 2585-2589.

[14] Quenelle R C. Nonlinearity in interferometric measurements[J]. Hewlett-Packard J, 1983, (34): 10.

[15] Sutton C M. Nonlinearity in the length measurement using heterodyne laser Michelson interferometry[J]. Science Instrument, 1987, 20(1): 1290-1292.

[16] Hou Wenmei, Qiu Huifu. The influence of elliptical polarization of Zeeman-laser upon the heterodyne phase comparing interferometry[J]. Acta Metrologica Sinica, 1988, 9(3): 199-202.

[17] Hou W M, Gunter W. Investigation and compensation of the nonlinearity of heterodyne interferometers[J]. Precision Engineering, 1992, 14(1): 91-98.

[18] Bobroff N. Recent advances in displacement measuring interferometry[J]. Meas Sci Technol, 1993, 4(9): 907-926.

[19] Rosenbluth A E, Bobroff N. Optical sources of non-linearity in heterodyne interferometers[J]. Precision Engineering, 1990, 12(1): 7-11.

[20] Wu C M, Richard D. Analytical modeling of the periodic nonlinearity in heterodyne interferometry[J]. Appplied Optics, 1998, 37(28): 6696-6700.

[21] Cosijins S J A G, Haitjema H, Schellekens P H J. Modeling and verifying non-linearities in heterodyne displacement interferometry[J]. Precision Engineering, 2002, 26(4): 448-455.

[22] Badami V G, Patterson S R. A frequency domain method for the measurement of nonlinearity in heterodyne interferometry[J]. Precision Engineering, 2000, 24(1): 41-49.

[23] Eom T B, Choi T Y, Lee K H, et al.. A simple method for the compensation of the nonlinearity in the heterodyne interferometer[J]. Meas Sci Technol, 2002, 13(4): 222-225.

[24] Eom T B, Kim J, Kang C, et al.. A simple phase-encoding electronics for reducing the nonlinearity error of a heterodyne interferometer[J]. Meas Sci Technol, 2008, 19(7): 075302.

[25] Schmitz T L, Chu D. First-order periodic error correction validation for constant and non-constant velocities with variable error magnitudes[J]. Meas Sci Technol, 2006, 17(12): 3195-3203.

[26] Tan J B, Fu H J, Hu P C, et al.. A laser polarization state measurement method based on the beat amplitude characteristic[J]. Meas Sci Technol, 2011, 22(8): 085302.

[27] Dai Gaoliang, Xu Yi, Chao Zhixia, et al.. Determining the residual nonlinear error of a dual-frequency interferometer for nanometrology[J]. Chinese J Lasers, 1999, 26(11): 987-991.

[28] Chen Hongfang, Ding Xuemei, Zhong Zhi, et al.. Method to reduce first harmonic nonlinearity in laser heterodyne interferometry[J]. Acta Optica Sinica, 2007, 27(6): 1027-1030.

[29] Chen Hongfang, Zhong Zhi, Ding Xuemei. Compensation of nonlinear errors in laser heterodyne interferometers[J]. Optics and Precision Engineering, 2010, 18(5): 1043-1047.

[30] Hou Wenmei, Zhang Yunbo, Le Yanfen, et al.. Elimination of the nonlinearity of heterodyne displacement interferometers[J]. Chinese J Lasers, 2012, 39(9): 0908006.

[31] Zhong Zhi, Tan Jiubin, Chen Hongfang, et al.. A novel method to measure the nonlinearity in laser heterodyne interferometer[J]. Journal of Optoelectranics·Laser, 2005, 16(7): 817-820.

[32] Chen Hongfang, Zhong Zhi, Ding Xuemei. The method to measure the nonlinearity in laser heterodyne interferometer[J]. Journal of Beijing University of Technology, 2010, 36(6): 754-758.