• Acta Optica Sinica
  • Vol. 41, Issue 12, 1226001 (2021)
Zhifan Liu1, Yanmin Cai2, Yang Bu2、*, Jianhua Zhang1, and Xiangzhao Wang2
Author Affiliations
  • 1School of Mechatronic Engineering and Automation, Shanghai University, Shanghai 200444, China
  • 2Laboratory of Information Optics and Optoelectronic Technology, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China
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    DOI: 10.3788/AOS202141.1226001 Cite this Article Set citation alerts
    Zhifan Liu, Yanmin Cai, Yang Bu, Jianhua Zhang, Xiangzhao Wang. Stress Birefringence Analysis in Fused Silica at Deep Ultraviolet Waveband Based on Finite Element Simulation Method[J]. Acta Optica Sinica, 2021, 41(12): 1226001 Copy Citation Text show less
    Schematic of three coordinate systems. (a) System coordinate; (b) refraction coordinate; (c) stress coordinate
    Fig. 1. Schematic of three coordinate systems. (a) System coordinate; (b) refraction coordinate; (c) stress coordinate
    Stress components coloring contours. (a) Normal stress σx; (b) normal stress σy; (c) shear stress τxy
    Fig. 2. Stress components coloring contours. (a) Normal stress σx; (b) normal stress σy; (c) shear stress τxy
    Stress birefringence simulation results at 632.8 nm wavelength
    Fig. 3. Stress birefringence simulation results at 632.8 nm wavelength
    Wavefront map of exit pupil at 632.8 nm wavelength
    Fig. 4. Wavefront map of exit pupil at 632.8 nm wavelength
    Measuring results of stress birefringence at 632.8 nm wavelength
    Fig. 5. Measuring results of stress birefringence at 632.8 nm wavelength
    Simulation result of stress birefringence at 248 nm wavelength
    Fig. 6. Simulation result of stress birefringence at 248 nm wavelength
    Simulation result of stress birefringence at 193 nm wavelength
    Fig. 7. Simulation result of stress birefringence at 193 nm wavelength
    MethodFinite element with ray tracing methodProposed method
    Finite element meshing343260
    Ray tracing15/
    Post calculation/21
    Total time358281
    Table 1. Runtime analysis results of the two stress birefringence analysis methodsunit: s
    Zhifan Liu, Yanmin Cai, Yang Bu, Jianhua Zhang, Xiangzhao Wang. Stress Birefringence Analysis in Fused Silica at Deep Ultraviolet Waveband Based on Finite Element Simulation Method[J]. Acta Optica Sinica, 2021, 41(12): 1226001
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