• Laser & Optoelectronics Progress
  • Vol. 56, Issue 15, 150603 (2019)
Hanzheng Li1、2, Gaomi Wu1、2, Zhenjun Ma1、2, Dipeng Ren1、2, Mengying Zhang1, Ran Gao1, and Zhimei Qi1、2、*
Author Affiliations
  • 1 State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing 100190, China
  • 2 University of Chinese Academy of Sciences, Beijing 100049, China
  • show less
    DOI: 10.3788/LOP56.150603 Cite this Article Set citation alerts
    Hanzheng Li, Gaomi Wu, Zhenjun Ma, Dipeng Ren, Mengying Zhang, Ran Gao, Zhimei Qi. Preparation of Fiber-Optic Interferometer Based Infrasound Sensor[J]. Laser & Optoelectronics Progress, 2019, 56(15): 150603 Copy Citation Text show less
    Structure of diaphragm EFPI sensor
    Fig. 1. Structure of diaphragm EFPI sensor
    Relationship between output signal and low-frequency infrasound disturbance
    Fig. 2. Relationship between output signal and low-frequency infrasound disturbance
    Result of first-order modal analysis by ANSYS
    Fig. 3. Result of first-order modal analysis by ANSYS
    Relationship between different model parameters and first-order resonant frequency. (a) Diaphragm material; (b) diaphragm thickness; (c) diaphragm radius; (d) diaphragm prestress
    Fig. 4. Relationship between different model parameters and first-order resonant frequency. (a) Diaphragm material; (b) diaphragm thickness; (c) diaphragm radius; (d) diaphragm prestress
    Results of finite element harmonic response analysis by ANSYS (0-10 kHz)
    Fig. 5. Results of finite element harmonic response analysis by ANSYS (0-10 kHz)
    EFPI sensor. (a) Structural diagram; (b) photograph
    Fig. 6. EFPI sensor. (a) Structural diagram; (b) photograph
    Interference spectrum of EFPI sensor
    Fig. 7. Interference spectrum of EFPI sensor
    Test device of optical fiber EFPI acoustic sensor
    Fig. 8. Test device of optical fiber EFPI acoustic sensor
    Characterization of sensor characteristics. (a) Frequency response; (b) Sensitivity
    Fig. 9. Characterization of sensor characteristics. (a) Frequency response; (b) Sensitivity
    Signal output of sensor under 5 Hz sound source excitation. (a) Time domain; (b) frequency domain
    Fig. 10. Signal output of sensor under 5 Hz sound source excitation. (a) Time domain; (b) frequency domain
    Signal output of sensor under 1 Hz sound source excitation. (a) Time domain; (b) frequency domain
    Fig. 11. Signal output of sensor under 1 Hz sound source excitation. (a) Time domain; (b) frequency domain
    Signal output of sensor under 0.5 Hz sound source excitation. (a) Time domain; (b) frequency domain
    Fig. 12. Signal output of sensor under 0.5 Hz sound source excitation. (a) Time domain; (b) frequency domain
    Hanzheng Li, Gaomi Wu, Zhenjun Ma, Dipeng Ren, Mengying Zhang, Ran Gao, Zhimei Qi. Preparation of Fiber-Optic Interferometer Based Infrasound Sensor[J]. Laser & Optoelectronics Progress, 2019, 56(15): 150603
    Download Citation