Researching | Assembly Error Tolerance of Interferometer Plate in Mirau Interference-Microscope Objective

Journals >Chinese Journal of Lasers >Volume 46 >Issue 9 >Page 904001 > Article

Chinese Journal of Lasers
Vol. 46, Issue 9, 904001 (2019)

Assembly Error Tolerance of Interferometer Plate in Mirau Interference-Microscope Objective

Hu Jie, Yuan Qun, Yu Haobiao, Wang Shuai, Sun Yifeng, and Gao Zhishan^*

Author Affiliations

School of Electronic and Optical Engineering, Nanjing University of Science and Technology,Nanjing, Jiangsu 210094, China

show less

DOI: 10.3788/CJL201946.0904001 Cite this Article Set citation alerts

Hu Jie, Yuan Qun, Yu Haobiao, Wang Shuai, Sun Yifeng, Gao Zhishan. Assembly Error Tolerance of Interferometer Plate in Mirau Interference-Microscope Objective[J]. Chinese Journal of Lasers, 2019, 46(9): 904001 Copy Citation Text

show less

References

[1] Harasaki A, Wyant J C. Fringe modulation skewing effect in white-light vertical scanning interferometry[J]. Applied Optics, 39, 2101-2106(2000). http://www.ncbi.nlm.nih.gov/pubmed/18345113

[2] Luo S J, Sasaki O, Chen Z Y et al. Utilization of complex-valued signals in a white-light scanning interferometer for accurate measurement of a surface profile[J]. Applied Optics, 56, 4419-4425(2017). http://www.ncbi.nlm.nih.gov/pubmed/29047872

[3] Deng Q Y, Tang Y, Zhou Y et al. High-resolution surface topography measurement based on frequency-domain analysis in white light interferometry[J]. Chinese Journal of Lasers, 45, 0604001(2018).

[4] Li C S, Shen W D, Zhang Y G et al. Measurement of group delay dispersion of dispersive mirror based on white-light interference[J]. Acta Optica Sinica, 32, 1031003(2012).

[5] Farr K B. Beamsplitter cube for white light interferometry[J]. Optical Engineering, 31, 2191-2196(1992). http://spie.org/Publications/Journal/10.1117/12.59886

[6] Pförtner A, Schwider J. Dispersion error in white-light Linnik interferometers and its implications for evaluation procedures[J]. Applied Optics, 40, 6223-6228(2001). http://www.opticsinfobase.org/abstract.cfm?URI=AO-40-34-6223

[7] Pavlicek P, Soubusta J. Measurement of the influence of dispersion on white-light interferometry[J]. Applied Optics, 43, 766-770(2004). http://www.ncbi.nlm.nih.gov/pubmed/14960067

[8] Pikálek T, Fort T, Buchta Z. Detection techniques in low-coherence interferometry and their impact on overall measurement accuracy[J]. Applied Optics, 53, 8463-8470(2014). http://www.ncbi.nlm.nih.gov/pubmed/25608195

[9] de Groot P, de Lega X C. Signal modeling for low-coherence height-scanning interference microscopy[J]. Applied Optics, 43, 4821-4830(2004). http://www.ncbi.nlm.nih.gov/pubmed/15449468

[10] Ghosh G. Sellmeier coefficients and dispersion of thermo-optic coefficients for some optical glasses[J]. Applied Optics, 36, 1540-1546(1997). http://www.opticsinfobase.org/abstract.cfm?uri=ao-36-7-1540

[11] Han Z G, Chen L. Eight-step phase shifting algorithm for broadband light interferometry insensitive to envelop variation and phase shifting error[J]. Infrared and Laser Engineering, 44, 1236-1242(2015).

Get PDF(in Chinese)

Figures&Tables (10)

References (11)

Copy Citation Text

Hu Jie, Yuan Qun, Yu Haobiao, Wang Shuai, Sun Yifeng, Gao Zhishan. Assembly Error Tolerance of Interferometer Plate in Mirau Interference-Microscope Objective[J]. Chinese Journal of Lasers, 2019, 46(9): 904001

Download Citation

Set citation alerts for the article

Set citation alerts for the article

Save the article for my favorites

Paper Information

Recommended Topics

laser devices and laser physics

Lasers and Laser Optics

laser manufacturing

Instrumentation, Measurement and Metrology

Set citation alerts for the article

Please enter your email address