Hu Jie, Yuan Qun, Yu Haobiao, Wang Shuai, Sun Yifeng, Gao Zhishan. Assembly Error Tolerance of Interferometer Plate in Mirau Interference-Microscope Objective[J]. Chinese Journal of Lasers, 2019, 46(9): 904001
- Chinese Journal of Lasers
- Vol. 46, Issue 9, 904001 (2019)
Fig. 1. Interferometric imaging optical path of white light interferometer and Mirau interference-microscope objective
Fig. 2. Equivalent optical path of interference-microscope objective with titled reference plate. (a) Sectional optical path of interference- microscope objective; (b) top view of pupil plane in interference-microscope objective; (c) division of S region in pupil plane
Fig. 3. Relationship between tilt of reference plate θ and rotation angle α
Fig. 4. Interferometric optical path with tilted reference plate
Fig. 5. Spectral distribution of LED light source
Fig. 6. Interference fringes under different tilts. (a) θ0=0°; (b) θ0=0.5°; (c) θ0=1°; (d) θ0=1.5°; (e) θ0=2°
Fig. 7. Comparison of morphology reconstruction results. (a) Primary morphology; (b) reconstruction errors under different tilts
Fig. 8. Measured results of step. (a) Information of standard step; (b) measured results of standard step by Veeco NT9100 profilometer
Fig. 9. Interference fringes and envelope amplitudes corresponding to different tilts of reference plate. (a) θ0=0°; (b) θ0=0.5°; (c) θ0=1°; (d) θ0=1.5°; (e) θ0=2°
|
Table 1. Measured height values of standard step under different tilts
Set citation alerts for the article
Please enter your email address
© Copyright 2018-2021 | Chinese Laser Press. All Rights Reserved 沪ICP备15018463号-20