Assembly Error Tolerance of Interferometer Plate in Mirau Interference-Microscope Objective

Hu Jie; Yuan Qun; Yu Haobiao; Wang Shuai; Sun Yifeng; Gao Zhishan

doi:10.3788/CJL201946.0904001

Journals >Chinese Journal of Lasers >Volume 46 >Issue 9 >Page 904001 > Article

Chinese Journal of Lasers
Vol. 46, Issue 9, 904001 (2019)

Assembly Error Tolerance of Interferometer Plate in Mirau Interference-Microscope Objective

Hu Jie, Yuan Qun, Yu Haobiao, Wang Shuai, Sun Yifeng, and Gao Zhishan^*

Author Affiliations

School of Electronic and Optical Engineering, Nanjing University of Science and Technology,Nanjing, Jiangsu 210094, China

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DOI: 10.3788/CJL201946.0904001 Cite this Article Set citation alerts

Hu Jie, Yuan Qun, Yu Haobiao, Wang Shuai, Sun Yifeng, Gao Zhishan. Assembly Error Tolerance of Interferometer Plate in Mirau Interference-Microscope Objective[J]. Chinese Journal of Lasers, 2019, 46(9): 904001 Copy Citation Text

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