• Laser & Optoelectronics Progress
  • Vol. 56, Issue 19, 190002 (2019)
Huiwen Zong1、2、3、**, Jiangshan Zhao1、2、3、*, Xingliang Song1、2、3, Xin Guo1、2, Qian Wang1、2、3, Hui Li1、2, and Yi Zhou1、2、3
Author Affiliations
  • 1Department of Projection Optics, Academy of Opto-Electronics, Chinese Academy of Sciences, Beijing 100094, China
  • 2Beijing Excimer Laser Technology and Engineering Center, Beijing 100094, China
  • 3University of Chinese Academy of Sciences, Beijing 100049, China
  • show less
    DOI: 10.3788/LOP56.190002 Cite this Article Set citation alerts
    Huiwen Zong, Jiangshan Zhao, Xingliang Song, Xin Guo, Qian Wang, Hui Li, Yi Zhou. Development of Research on Damage Characteristics of Calcium Fluoride Crystal Under Deep Ultraviolet Laser Irradiation[J]. Laser & Optoelectronics Progress, 2019, 56(19): 190002 Copy Citation Text show less
    References

    [1] Yu Y S, You L B, Liang X et al. Progress of excimer lasers technology[J]. Chinese Journal of Lasers, 37, 2253-2270(2010).

    [2] Endert H, Pätzel R, Rebhan U et al. New KrF and ArF excimer lasers for advanced deep ultraviolet optical lithography[J]. Japanese Journal of Applied Physics, 34, 4050-4054(1995).

    [3] Dong Y J, Zhou G Q, Yang W Q et al. Research and development of calcium fluoride crystals[J]. Laser & Optoelectronics Progress, 40, 43-47(2003).

    [4] Duan A F, Fan Y, Liu J L et al. Studies on CaF2 single crystals and its processing technique[J]. Journal of Changchun University of Science and Technology(Natural Science Edition), 30, 97-99(2007).

    [5] Wang J. Surface assessment and mitigation of DUV optics[J]. Proceedings of SPIE, 9628, 96280Y(2015).

    [6] Lou Q H, Xu J Q, Luo S. Optical materials and film layers for ArF and KrF excimer lasers[J]. Laser & Optoelectronics Progress, 34, 9-15(1997).

    [7] Deng W Y, Jin C S, Jin J C. Characterization of CaF2 substrates for ArF excimer laser[J]. Chinese Journal of Lasers, 38, 1002004(2011).

    [8] Tei D, Hattori M, Kumazaki T et al. Laser-induced damage and defect analysis of calcium fluoride window caused by the high pulse repetition rate of ArF excimer laser radiation[J]. Proceedings of SPIE, 10805, 108050H(2018).

    [9] Su L B, Yang W Q, Dong Y J et al. Research and progress of CaF2 crystal growth[J]. Journal of Synthetic Crystals, 32, 476-482(2003).

    [10] Retherford R S, Sabia R, Sokira V P. Effect of surface quality on transmission performance for (111) CaF2[J]. Applied Surface Science, 183, 264-269(2001).

    [11] Liu H W, Jiang G J, Shen Y H. Material characteristic of fluorite and optical processing[J]. Journal of Synthetic Crystals, 26, 396(1997).

    [12] Nicolov M. Shaped single crystals of CaF2[J]. Journal of Crystal Growth, 218, 62-66(2000).

    [13] Kawaguchi Y, Narazaki A, Sato T et al. Onset of laser ablation in CaF2 crystal under excimer laser irradiation[J]. Proceedings of SPIE, 4637, 13-20(2002).

    [14] Johansen H, Gogoll S, Stenzel E et al. Sem-analysis of fracture features formed in excimer-laser induced surface damage of CaF2[J]. Radiation Effects and Defects in Solids, 136, 151-156(1995).

    [15] Gogoll S, Stenzel E, Reichling M et al[J]. 111, surfaces at 248 nm. Applied Surface Science, 96/97/98, 332-340(1996).

    [16] Guo T Y, Zhang L M, Ren Y Y et al. Surface characteristics of CaF2 crystal ablated by femtosecond laser[J]. Acta Optica Sinica, 39, 0126017(2019).

    [17] Mann K R, Pfeifer G, Reisse G. Damage threshold measurements using femtosecond excimer laser[J]. Proceedings of SPIE, 1848, 415-423(1993).

    [18] España A, Joly A G, Hess W P et al. Laser-induced damage of calcium fluoride[J]. Journal of Undergraduate Research, 4, 60-65(2004).

    [19] Reichling M, Sils J, Johansen H et al. Nanosecond UV laser damage and ablation from fluoride crystals polished by different techniques[J]. Applied Physics A: Materials Science & Processing, 69, S743-S747(1999).

    [20] Sils J, Reichling M, Matthias E et al. Laser damage and ablation of differently prepared CaF2(111) surfaces[J]. Czechoslovak Journal of Physics, 49, 1737-1742(1999).

    [21] Stenzel E, Gogoll S, Sils J et al[J]. the influence of polishing grades. Applied Surface Science, 109/110, 162-167(1997).

    [22] Mizuguchi M, Hosono H, Kawazoe H et al. Time-resolved photoluminescence for diagnosis of resistance to ArF excimer laser damage to CaF2 single crystals[J]. Journal of the Optical Society of America B, 16, 1153-1159(1999).

    [23] Mizuguchi M, Hosono H, Kawazoe H et al. Generation of optical absorption bands in CaF2 single crystals by ArF excimer laser irradiation: effect of yttrium impurity[J]. Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, 16, 3052-3057(1998).

    [24] Mizuguchi M, Hosono H, Kawazoe H et al. Color center formation and time-resolved photoluminescence for ArF excimer laser irradiation in CaF2 single crystals[J]. Proceedings of SPIE, 3424, 60-70(1998).

    [25] Komine N, Sakuma S, Shiozawa M et al. Influence of sodium impurities on ArF excimer-laser-induced absorption in CaF2 crystals[J]. Applied Optics, 39, 3925-3930(2000).

    [26] Tijero J M G, Jaque F. Thermal and optical properties of the FA and ( F2+)A centers in Na-doped CaF2 crystals[J]. Physical Review B, 41, 3832-3836(1990).

    [27] Muehlig C, Triebel W, Toepfer G et al. Calcium fluoride for ArF laser lithography: characterization by in situ transmission and LIF measurements[J]. Proceedings of SPIE, 4932, 458-466(2003).

    [28] Azumi M, Nakahata E. Study of relation between crystal structure and laser damage of calcium fluoride[J]. Proceedings of SPIE, 7842, 78421U(2010).

    [29] Azumi M, Nakahata E. Laser damage of calcium fluoride by ArF excimer laser irradiation[J]. Proceedings of SPIE, 9632, 963213(2015).

    [30] Kerr N C, Emmony D C. The effect of laser annealing on laser-induced damage threshold[J]. Journal of Modern Optics, 37, 787-802(1990).

    [31] Stolz C J, Blaschke H, Jensen L et al. Excimer mirror thin film laser damage competition[J]. Proceedings of SPIE, 8190, 819007(2011).

    [32] Marsh E R, John B P, Couey J A et al. Predicting surface figure in diamond turned calcium fluoride using in-process force measurement[J]. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 23, 84-89(2005).

    [33] Yan J W, Syoji K, Tamaki J. Crystallographic effects in micro/nanomachining of single-crystal calcium fluoride[J]. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 22, 46-51(2004).

    [34] Xie C. Research on magnetorheological finishing technics of optical mirror materials of CaF2[D]. Changsha: National University of Defense Technology, 20-28(2009).

    [35] Dumas P, Golini D, Tricard M. Improvement of figure and finish of diamond turned surfaces with magneto-rheological finishing (MRF)[J]. Proceedings of SPIE, 5786, 296-304(2005).

    [36] Zhong X Y, Fan B, Wu F. High precision processing CaF2 application research based on the magnetorheological finishing technology[J]. Proceedings of SPIE, 10448, 104481Y(2017).

    [37] Yuan Z, Dai Y F, Xie X H et al. Research on ultra-precise figuring for CaF2 single crystal[J]. Journal of Mechanical Engineering, 49, 46-51(2013).

    [38] Zhan M Q. Enhancement of the LIDT of optical coatings[J]. Journal of Shanghai Second Polytechnic University, 27, 304-308(2010).

    [39] Wang J, Cox G P. D'Lallo M J, et al. Laser-induced damage of F-SiO2 protected fluoride based AR coating on a subsurface-damage-free CaF2 at 193 nm[J]. Proceedings of SPIE, 10014, 100140A(2016).

    Huiwen Zong, Jiangshan Zhao, Xingliang Song, Xin Guo, Qian Wang, Hui Li, Yi Zhou. Development of Research on Damage Characteristics of Calcium Fluoride Crystal Under Deep Ultraviolet Laser Irradiation[J]. Laser & Optoelectronics Progress, 2019, 56(19): 190002
    Download Citation