Advances in Scanning White Light Interferometry for Surface Topography Measurement

Rong Su; Jiayu Liu; Xiaoyue Qiao; Zhenxiong Jian; Zheng Zhang; Rongxian Wen; Cheng Chen; Mingjun Ren; Limin Zhu

doi:10.3788/LOP223228

Journals >Laser & Optoelectronics Progress >Volume 60 >Issue 3 >Page 0312005 > Article

Laser & Optoelectronics Progress
Vol. 60, Issue 3, 0312005 (2023)

Advances in Scanning White Light Interferometry for Surface Topography Measurement

Rong Su^1,*, Jiayu Liu^1,2, Xiaoyue Qiao^1,3, Zhenxiong Jian^1,2..., Zheng Zhang^1,4, Rongxian Wen¹, Cheng Chen¹, Mingjun Ren² and Limin Zhu²|Show fewer author(s)

Author Affiliations

¹Precision Optical Manufacturing and Testing Center, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China

²School of Mechanical Engineering, Shanghai Jiao Tong University, Shanghai 200240, China

³China-Russia Belt and Road Joint Laboratory on Laser Science, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China

⁴School of Optical-Electrical and Computer Engineering, University of Shanghai for Science and Technology, Shanghai 200093, China

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DOI: 10.3788/LOP223228 Cite this Article Set citation alerts

Rong Su, Jiayu Liu, Xiaoyue Qiao, Zhenxiong Jian, Zheng Zhang, Rongxian Wen, Cheng Chen, Mingjun Ren, Limin Zhu. Advances in Scanning White Light Interferometry for Surface Topography Measurement[J]. Laser & Optoelectronics Progress, 2023, 60(3): 0312005 Copy Citation Text

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