Athermal 4-channel (de-)multiplexer in silicon nitride fabricated at low temperature

Shiqi Tao; Qingzhong Huang; Liangqiu Zhu; Jun Liu; Yinglu Zhang; Ying Huang; Yi Wang; Jinsong Xia

doi:10.1364/PRJ.6.000686

Journals >Photonics Research >Volume 6 >Issue 7 >Page 686 > Article

Photonics Research
Vol. 6, Issue 7, 686 (2018)

Athermal 4-channel (de-)multiplexer in silicon nitride fabricated at low temperature

Shiqi Tao¹, Qingzhong Huang^1、2、*, Liangqiu Zhu¹, Jun Liu¹, Yinglu Zhang¹, Ying Huang¹, Yi Wang¹, and Jinsong Xia^1、3、*

Author Affiliations

¹Wuhan National Laboratory for Optoelectronics, Huazhong University of Science and Technology, Wuhan 430074, China

²e-mail: huangqz@mail.hust.edu.cn

³e-mail: jsxia@hust.edu.cn

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DOI: 10.1364/PRJ.6.000686 Cite this Article Set citation alerts

Shiqi Tao, Qingzhong Huang, Liangqiu Zhu, Jun Liu, Yinglu Zhang, Ying Huang, Yi Wang, Jinsong Xia. Athermal 4-channel (de-)multiplexer in silicon nitride fabricated at low temperature[J]. Photonics Research, 2018, 6(7): 686 Copy Citation Text

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