Author Affiliations
1School of Opto-Electronic Engineering, Xi'an Technological University, Xi'an , Shaanxi 710021, China2School of Electronic Information Engineering, Xi'an Technological University, Xi'an , Shaanxi 710021, Chinashow less
Fig. 1. Structure of the pressure sensing probe
Fig. 2. Optical structure of the pressure sensor
Fig. 3. Optical structure of the temperature compensation
Fig. 4. Flow chart of the temperature compensation method
Fig. 5. Principle of the experimental scheme
Fig. 6. Pressure-cavity length variation curve of the pressure sensor during single measurement
Fig. 7. Pressure-cavity length variation curve of pressure sensor during repeated measurement
Fig. 8. Temperature-cavity length variation curve of the reference sensor
Fig. 9. Temperature-cavity length variation curve of the pressure sensor
Fig. 10. Measurement results before and after temperature compensation. (a) Cavity length variation in heating process; (b) temperature compensation accuracy in heating process; (c) cavity length variation in cooling process; (d) temperature compensation accuracy in cooling process
Fig. 11. Stability test of temperature compensation structure
Pressure /kPa | Measurement data /nm | Theoretical data /nm |
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0 | 0 | 0 | 100 | 30119 | 29428 | 200 | 57485 | 58856 | 300 | 88100 | 88283 | 400 | 118090 | 117711 | 500 | 147730 | 147139 |
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Table 1. Measurement data and theoretical data during single measurement
Cavity length /nm |
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Pressure /kPa | 1st time | 2nd time | 3rd time |
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0 | 0 | 0 | 0 | 100 | 29469 | 28460 | 30119 | 200 | 57833 | 56619 | 57485 | 300 | 86548 | 85626 | 88100 | 400 | 115169 | 114475 | 118090 | 500 | 143299 | 143195 | 143330 |
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Table 2. Measurement data of pressure sensor during repeated measurement
Temperature /℃ | Reference sensor displacement /nm | Temperature /℃ | Pressure sensor displacement /nm |
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25.4 | 0 | 26.27 | 0 | 28.4 | 9445 | 30 | 5551 | 31.4 | 16651 | 33 | 10013 | 34.4 | 23493 | 36 | 15155 | 37.4 | 29863 | 39 | 20594 | 40.4 | 35662 | 42 | 26106 | 43.4 | 41211 | 45 | 33346 | 46.4 | 46704 | / | / | 49.4 | 52366 | / | / |
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Table 3. Temperature measurement data of reference sensor and pressure sensor
Pressure /kPa | Uncompensated displacement /nm | Compensated displacement /nm | Reference displacement /nm |
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0 | 0 | 0 | 0 | 100 | -28197 | -29033 | 29428 | 200 | -55010 | -58916 | 58856 | 300 | -81722 | -86895 | 88283 | 400 | -108201 | -116754 | 117711 | 500 | -134788 | -146417 | 147139 |
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Table 4. Comparison of temperature compensation data in heating process
Pressure /kPa | Uncompensated displacement /nm | Compensated displacement /nm | Reference displacement /nm |
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0 | 0 | 0 | 0 | 100 | -26351 | -28859 | 29428 | 200 | -54206 | -57800 | 58856 | 300 | -83728 | -87067 | 88283 | 400 | -112478 | -117203 | 117711 | 500 | -141903 | -148146 | 147139 |
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Table 5. Comparison of temperature compensation data in cooling process