Polarization Scattering Characterization and Discrimination Principle of Surface Defects

Min Lu; Zhile Wang; Shuqing Zhang; Pingping Gao; Xiaobo He

doi:10.3788/AOS202141.1229001

[1] Huang C, Zhang K P, Wang X et al. Method for surface quality inspection based on total scattering measurement[J]. Acta Optica Sinica, 39, 0712005(2019).

[2] Liang L Q, Li D, Fu X et al. Touch screen defect inspection based on sparse representation in low resolution images[J]. Multimedia Tools and Applications, 75, 2655-2666(2016).

[3] Li D, Liang L Q, Zhang W J et al. Defect inspection and extraction of the mobile phone cover glass based on the principal components analysis[J]. The International Journal of Advanced Manufacturing Technology, 73, 1605-1614(2014). http://link.springer.com/article/10.1007/s00170-014-5871-y

[4] Zhang J P, Qin X P, Yuan J X et al. Defect location and size detection based on laser ultrasonic diffraction bulk wave[J]. Acta Optica Sinica, 40, 1214002(2020).

[5] Germer T A. Angular dependence and polarization of out-of-plane optical scattering from particulate contamination, subsurface defects, and surface microroughness[J]. Applied Optics, 36, 8798-8805(1997). http://www.opticsinfobase.org/ao/abstract.cfm?id=63116

[6] Lu R S, Wu A, Zhang T D et al. Review on automated optical (visual) inspection and its applications in defect detection[J]. Acta Optica Sinica, 38, 0815002(2018).

[7] Goldstein D H[M]. Polarized light, 808(2011).

[9] Young R P. Low-scatter mirror degradation by particle contamination[J]. Optical Engineering, 15, 156516(1976). http://adsabs.harvard.edu/abs/1976OptEn..15..516Y

[10] Young R P. Mirror-scatter degradation by particulate contamination[J]. Proceedings of the SPIE, 1329, 246-254(1990). http://spie.org/Publications/Proceedings/Paper/10.1117/12.22607

[11] Flynn D S, Alexander C. Polarized surface scattering expressed in terms of a bidirectional reflectance distribution function matrix[J]. Optical Engineering, 34, 1646-1650(1995). http://spie.org/Publications/Journal/10.1117/12.202105

[12] Wu J L, Zhang J B, Zhang L et al. Near forward light scattering characteristics of airborne particles[J]. Acta Optica Sinica, 36, 0529001(2016).