Hailong Li, Pan Min, Zhao Feng, Hao Xian, Hong Liu, Jingzhong Fang. Effect of forming process on microstructures and properties of aluminum oxynitride[J]. Opto-Electronic Engineering, 2022, 49(6): 210354
- Opto-Electronic Engineering
- Vol. 49, Issue 6, 210354 (2022)
![Schematic diagram of spray granulation[18]](/richHtml/gdgc/2022/49/6/210354/2_210354-1.jpg)
Fig. 1. Schematic diagram of spray granulation[18]
Fig. 2. SEM, XRD and particle size distribution results of AlON powder after ball milling
Fig. 3. SEM morphology of spraying granulated powders by different solid content slurries. (a) 30 wt%; (b) 40 wt%; (c) 50 wt%
Fig. 4. Schematic diagrams of drying atomized droplets with different solid contents
Fig. 5. Pictures of formed green body
Fig. 6. SEM results of AlON green body formed by different pressures. (a) 150 MPa; (b) 200 MPa; (c) 260 MPa
Fig. 7. Pore size distribution of green body formed by different pressures
Fig. 8. Transmittance of different forming pressures (thickness 2 mm)
Fig. 9. AlON transparent ceramic plate (a) and dome (b) fabricated by cold isostatic pressing and pressureless sintering
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Table 1. Green body density of different forming pressures
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Table 2. AlON transparent ceramic density of different forming pressures
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