Jones Pupil Measurement Method of Lithographic Projection Lens

Zejiang Meng; Sikun Li; Xiangzhao Wang; Yang Bu; Chaoxing Yang

doi:10.3788/AOS201939.0312004

Journals >Acta Optica Sinica >Volume 39 >Issue 3 >Page 0312004 > Article

Acta Optica Sinica
Vol. 39, Issue 3, 0312004 (2019)

Jones Pupil Measurement Method of Lithographic Projection Lens

Zejiang Meng^1、2, Sikun Li^1、2、*, Xiangzhao Wang^1、2、*, Yang Bu^1、2, and Chaoxing Yang^1、2

Author Affiliations

¹ Laboratory of Information Optics and Opto-Electronic Technology, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China

² University of Chinese Academy of Sciences, Beijing 100049, China

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DOI: 10.3788/AOS201939.0312004 Cite this Article Set citation alerts

Zejiang Meng, Sikun Li, Xiangzhao Wang, Yang Bu, Chaoxing Yang. Jones Pupil Measurement Method of Lithographic Projection Lens[J]. Acta Optica Sinica, 2019, 39(3): 0312004 Copy Citation Text

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References

Zejiang Meng, Sikun Li, Xiangzhao Wang, Yang Bu, Chaoxing Yang. Jones Pupil Measurement Method of Lithographic Projection Lens[J]. Acta Optica Sinica, 2019, 39(3): 0312004

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