Zejiang Meng, Sikun Li, Xiangzhao Wang, Yang Bu, Chaoxing Yang. Jones Pupil Measurement Method of Lithographic Projection Lens[J]. Acta Optica Sinica, 2019, 39(3): 0312004
- Acta Optica Sinica
- Vol. 39, Issue 3, 0312004 (2019)
![Approximate polar decomposition of Jones matrix[12]](/richHtml/gxxb/2019/39/3/0312004/img_1.jpg)
Fig. 1. Approximate polar decomposition of Jones matrix[12]
![Pupil maps of OZP[13]](/richHtml/gxxb/2019/39/3/0312004/img_2.jpg)
Fig. 2. Pupil maps of OZP[13]
Fig. 3. Schematic of Jones pupil measurement device
Fig. 4. Original Jones pupil. (a) Diattenuation; (b) retardation
Fig. 5. OZP coefficients of original Jones pupil. (a) Diattenuation; (b) retardation
Fig. 6. Measured Jones pupil by proposed method. (a) Diattenuation; (b) retardation
Fig. 7. Measured diattenuation of the proposed and the conventional method under different error settings. (a) Conventional method, without errors; (b) conventional method, with errors; (c) proposed method, without errors; (d) proposed method, with errors
Fig. 8. Amplitude errors of measured Jones pupil by proposed method. (a) Diattenuation; (b) retardation
Fig. 9. OZP coefficient errors of measured Jones pupil by proposed method. (a) Diattenuation; (b) retardation
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Table 1. Error sources in Jones pupil measurement device
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Table 2. Three typical angle configurations
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Table 3. Measurement errors comparison between the proposed and the conventional method under different angle configurations of polarization elements
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