• Opto-Electronic Engineering
  • Vol. 37, Issue 7, 102 (2010)
MA Ping*, ZHOU Shao-lin, HU Song, and XU Wen-xiang
Author Affiliations
  • [in Chinese]
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    DOI: Cite this Article
    MA Ping, ZHOU Shao-lin, HU Song, XU Wen-xiang. The Analysis of Moiré Fringes and Application on the Alignment of Lithography[J]. Opto-Electronic Engineering, 2010, 37(7): 102 Copy Citation Text show less
    References

    [1] HEOCARIS P S,VAFIADAKIS A P,LIAKOPOULOS C. Theory of Spatial Moiré Fringes [J]. JOSA(S1084-7529),1968, 58(8):1092.

    [2] Pickthorne B,Rogers G L. Moiré-pattern technique for measurement of fringe spacings [J]. Optics Letters(S0146-9592),1982, 7(10):474-476.

    [3] Shepherd G G,Paffrath L. A Moiré Fringe Method of Fabry-Perot Spectrometer Scanning [J]. Applied Optics(S0003-6935), 1967,6(10):1659-1663.

    [4] Kim B J,Song J S,Kim J T,et al. Determination of small angular displacement by moiré fringes of matched radial-parallel gratings [J]. Applied Optics(S0003-6935),1997,36(13):2848-2855.

    [5] Wegdam Alfons M F,Podzimek O,Zijistra S. Projection moire fringe pattern prediction using the optical transfer function [J]. Applied Optics(S0003-6935),1991,30(13):1673-1677.

    [6] Yokozeki S,Kusaka Y,Patorski K. Geometric parameters of moiré fringes [J]. Applied Optics(S0003-6935),1976,15(9): 2223-2227.

    [7] Lohmann A W. On Moiré Fringes as Fourier Test Objects [J]. Applied Optics(S0003-6935),1966,5(4):669-670.

    [8] CAI Sheng,QIAO Yan-feng. Influence of a General Small Inclination of Two Gratings on the Moiré Fringe [C]∥CLEOPR, 2009:TUP12_11.

    [9] YoshinoYoichi,Takasaki Hiroshi. Doubling and visibility enhancement of moire fringes of the summation type [J]. Applied Optics(S0003-6935),1976,15(5):1124-1126.

    [10] Bell Bernard W,Chris L Koliopoulos. Moiré topography,sampling theory,and charged-coupled devices [J]. Optics Letters(S0146-9592),1984,9(5):171-173.

    [11] WANG Wei-ning,SUN Jian-hai. A modified moire interferometer for three-dimensional displacement measurement [J]. Chinese Optics Letters(S1671-7694),2004,2(7):396-398

    CLP Journals

    [1] Tong Junmin, Zhou Shaolin, Zhao Lixin, Hu Song. Angular Measurement Using Moire Interferometry for Alignment of Proximity Lithography[J]. Chinese Journal of Lasers, 2014, 41(12): 1208001

    MA Ping, ZHOU Shao-lin, HU Song, XU Wen-xiang. The Analysis of Moiré Fringes and Application on the Alignment of Lithography[J]. Opto-Electronic Engineering, 2010, 37(7): 102
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