• Photonics Research
  • Vol. 8, Issue 9, 1506 (2020)
Yu Han1、2, Zhiguang Liu3, Shanshan Chen1, Juan Liu2、4、*, Yongtian Wang2, and Jiafang Li1、3、5、*
Author Affiliations
  • 1Key Laboratory of Advanced Optoelectronic Quantum Architecture and Measurement (Ministry of Education), Beijing Key Laboratory of Nanophotonics & Ultrafine Optoelectronic Systems, and School of Physics, Beijing Institute of Technology, Beijing 100081, China
  • 2Beijing Engineering Research Center for Mixed Reality and Advanced Display, School of Optics and Photonics, Beijing Institute of Technology, Beijing 100081, China
  • 3Institute of Physics, Chinese Academy of Sciences, Beijing 100190, China
  • 4e-mail: juanliu@bit.edu.cn
  • 5e-mail: jiafangli@bit.edu.cn
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    DOI: 10.1364/PRJ.398467 Cite this Article Set citation alerts
    Yu Han, Zhiguang Liu, Shanshan Chen, Juan Liu, Yongtian Wang, Jiafang Li. Cascaded multilayer nano-kirigami for extensible 3D nanofabrication and visible light manipulation[J]. Photonics Research, 2020, 8(9): 1506 Copy Citation Text show less

    Abstract

    Nano-kirigami enables direct and versatile shape transformations from two-dimensional predesigns to three-dimensional (3D) architectures in microscale/nanoscale. Here a new and extensible strategy for cascaded multilayer nano-kirigami is demonstrated in a gold/silicon nitride (Au/SiN) bilayer nanofilm for 3D nanofabrication and visible light manipulation. By employing a focused ion-beam-based Boolean irradiation, rich 3D shape transformation and nested multilayer nanostructures are precisely manufactured, which are well reproduced by developing a modified mechanical model. Based on the multilayer and deformable features of the nano-kirigami structures, potentials in manipulating the phase and intensity of visible light are explored. The developed new nano-kirigami strategies, as well as the novel exotic 3D nanostructures, could be helpful to build a novel platform for 3D nanofabrication and find potential applications in microelectromechanical/nanoelectromechanical systems, holographic display, plasmonics, nanophotonics, biophotonics, etc.
    F=0hσin-planedz=0,M=0hzσin-planedz=0,(1)

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    σin-plane(z)={σt=consthb<zhb+htσb=σ0in-plane+kz0z<hb.(2)

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    Eplane={αEAu(exposed  Au  layer)EAu(unexposed  Au  layer)ESiN(SiN  layer),(3)

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    Yu Han, Zhiguang Liu, Shanshan Chen, Juan Liu, Yongtian Wang, Jiafang Li. Cascaded multilayer nano-kirigami for extensible 3D nanofabrication and visible light manipulation[J]. Photonics Research, 2020, 8(9): 1506
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