Ellipcometric measurement of biaxial single crystal films on biaxial crystal substrats

SHI LUPING; JIANG MINHUA; SHAO ZHONGSHU; LIU YAOGANG; WANG JITANG

Journals >Acta Optica Sinica >Volume 9 >Issue 11 >Page 1033 > Article

Acta Optica Sinica
Vol. 9, Issue 11, 1033 (1989)

Ellipcometric measurement of biaxial single crystal films on biaxial crystal substrats

SHI LUPING, JIANG MINHUA, SHAO ZHONGSHU, LIU YAOGANG, and WANG JITANG

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[in Chinese]

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SHI LUPING, JIANG MINHUA, SHAO ZHONGSHU, LIU YAOGANG, WANG JITANG. Ellipcometric measurement of biaxial single crystal films on biaxial crystal substrats[J]. Acta Optica Sinica, 1989, 9(11): 1033 Copy Citation Text

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Abstract

This paper presnts two kinds of methods for measuring the biaxial single crystal films on the biaxial crystal substroats. We have used such methods to measure the thickness and refractive index of the film layer of KTP waveguide.

Keywords

biaxial crystal ellipsometrio measurement ludioatrix

SHI LUPING, JIANG MINHUA, SHAO ZHONGSHU, LIU YAOGANG, WANG JITANG. Ellipcometric measurement of biaxial single crystal films on biaxial crystal substrats[J]. Acta Optica Sinica, 1989, 9(11): 1033

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