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    Journals >Acta Optica Sinica >Volume 37 >Issue 3 >Page 322003 > Article
    • Acta Optica Sinica
    • Vol. 37, Issue 3, 322003 (2017)
    Design and Experiment of Active Compensation System for Thermal Aberration of Lithographic Lens
    Dong Lijian*, Cui Qinglong, Li Pengzhi, and Zhao Lei
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    DOI: 10.3788/aos201737.0322003 Cite this Article Set citation alerts
    Dong Lijian, Cui Qinglong, Li Pengzhi, Zhao Lei. Design and Experiment of Active Compensation System for Thermal Aberration of Lithographic Lens[J]. Acta Optica Sinica, 2017, 37(3): 322003 Copy Citation Text show less
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    Dong Lijian, Cui Qinglong, Li Pengzhi, Zhao Lei. Design and Experiment of Active Compensation System for Thermal Aberration of Lithographic Lens[J]. Acta Optica Sinica, 2017, 37(3): 322003
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