Laser Interferometer Technology and Instruments for Sub-Nanometer and Picometer Displacement Measurements

Xionglei Lin; Xiaobo Su; Jianing Wang; Yunke Sun; Pengcheng Hu

doi:10.3788/LOP230440

Journals >Laser & Optoelectronics Progress >Volume 60 >Issue 3 >Page 0312016 > Article

Laser & Optoelectronics Progress
Vol. 60, Issue 3, 0312016 (2023)

Laser Interferometer Technology and Instruments for Sub-Nanometer and Picometer Displacement Measurements

Xionglei Lin^1,2, Xiaobo Su^1,2, Jianing Wang^1,2, Yunke Sun^1,2, and Pengcheng Hu^1,2,*

Author Affiliations

¹Center of Ultra-Precision Optoelectronic Instrument Engineering, Harbin Institute of Technology, Harbin 150080, Heilongjiang, China

²Key Laboratory of Ultra-Precision Intelligent Instrumentation, Ministry of Industry and Information Technology, Harbin 150080, Heilongjiang, China

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DOI: 10.3788/LOP230440 Cite this Article Set citation alerts

Xionglei Lin, Xiaobo Su, Jianing Wang, Yunke Sun, Pengcheng Hu. Laser Interferometer Technology and Instruments for Sub-Nanometer and Picometer Displacement Measurements[J]. Laser & Optoelectronics Progress, 2023, 60(3): 0312016 Copy Citation Text

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