Author Affiliations
MOE Key Laboratory of TianQin Mission, TianQin Research Center for Gravitational Physics & School of Physics and Astronomy, Frontiers Science Center for TianQin, Gravitational Wave Research Center of CNSA, Sun Yat-sen University (Zhuhai Campus), Zhuhai, Guangdong 519082, Chinashow less
Fig. 1. Schematic diagram of the composition of a three-degree-of-freedom deformation measurement system
Fig. 2. Schematic diagram of the three-degree-of-freedom deformation measurement system
Fig. 3. Schematic diagram of measurement point position selection
Fig. 4. Schematic diagram of the decoupling mathematical model for the three-degree-of-freedom deformation measurement system
Fig. 5. Zemax optical system simulation
Fig. 6. Relationship between displacement and phase
Fig. 7. (a) Schematic diagram of the actual measurement path; (b) Zemax optical path modeling diagram
Fig. 8. Laser frequency noise background
Fig. 9. Laboratory temperature and vibration level. (a) Temperature test chart; (b) Vibration test chart
Fig. 10. NI data acquisition card noise background
Fig. 11. Photodetector noise background
Fig. 12. Background noise of the single chain interferometer
方法 | 优点 | 缺点 | 电学法[20] | 电容测量 | 精度高、稳定性好、测量速度快、反应时间快 | 无法实现非接触测量,测量范围小 | 电感测量 | 精度高、对工作环境要求低 | 光学法[21] | 光杠杆 | 测量原理简单,易操作,稳定性高 | 灵敏度低 | 多路干涉 | 响应速度快,灵敏度在1 mHz以上占有优势,测量范围更大,角度测量非线性更小 | 结构复杂,对环境敏感,对结构复杂微 变形的测量和表征能力有限 | 差分波前 | 角度测量简单高效 | 只能进行角度测量且精度受限于探测器 |
|
Table 1. Advantages and disadvantages of multiple-degree-of-freedom measurement methods
相对位移 | 相位差 | PD1 | PD2 | PD3 | 初始位置 | 0 | 0 | 0 | 沿光轴方向+z平移20 nm | 0.47 | 0.47 | 0 | Rx方向旋转1.7 µrad | 0.66 | 0.47 | 0.61 | 垂直光轴方向+y平移20 nm | 0 | 0 | 0.30 |
|
Table 2. Test the relationship between the rigid body displacement of the mirror and the phase difference received by the photodetector
自由度 | 比值 | z | dI : S : α = 1 : 0 : 0 | Rx | dI : S : α= 10000 : 1 : 0 | y | dI : S : α= 10000 : 1 : 1 |
|
Table 3. Error sensitivity analysis of the measurement system with multiple degrees of freedom
测量系统组成部分 | 主要噪声源 | 噪声分配 (nm/Hz1/2@1 mHz) | 备注 | 激光光源 | 激光频率噪声 | 3 | 要求激光频率噪声δf小于4.2×107<Hz/Hz1/2@1 mHz | 前端光程耦合噪声 | 声光调制耦合噪声 | 1 | 等效位移噪声<1 nm/Hz1/2@1 mHz | 光纤温度耦合噪声 | 2 | 光纤温度波动δT≤15 mK/Hz1/2@1 mHz | 集成光学 器件平台 | 温度位移耦合噪声 | 8 | 温度位移耦合系数dS/dT=70 nm/K,测试环境温度波动δT≤15 mK/Hz1/2@1 mHz | 振动位移耦合噪声 | 2 | 振动位移耦合系数dS/dx=0.3×10−3 m/m,测试环境振动波动δX≤1×10−3 m/s /Hz1/2@1 mHz | 空气折射率噪声 | 2 | 温度波动δT≤15 mK/Hz1/2@1 mHz | 偏振噪声 | 2 | 等效位移噪声<2 nm/Hz1/2@1 mHz | 杂散光噪声 | 3 | 控制杂散光强度相较于主光束低于−20 dB | 信号采集 数据处理 | 探测器耦合噪声 | 1 | 相对强度噪声需低于−100 dB/Hz@1 mHz | 相位读取噪声 | 0.01 | 要求相位计等效位移本底噪声是0.01 nm/Hz1/2@1 mHz | 测量系统总体噪声 | | 10 |
|
Table 4. Allocation and requirements of optical path noise indicators for the telescope deformation measurement system