• Chinese Journal of Lasers
  • Vol. 48, Issue 8, 0802012 (2021)
Xingwen Zhou, Jianing Liao, Yu Yao, Hui Kang, Wei Guo, and Peng Peng*
Author Affiliations
  • School of Mechanical Engineering & Automation, Beihang University, Beijing 100191, China
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    DOI: 10.3788/CJL202148.0802012 Cite this Article Set citation alerts
    Xingwen Zhou, Jianing Liao, Yu Yao, Hui Kang, Wei Guo, Peng Peng. Direct Laser Writing of Micro/Nano Copper Structures and Their Applications[J]. Chinese Journal of Lasers, 2021, 48(8): 0802012 Copy Citation Text show less
    Typical “bottom-up” laser processing of micro/nano structures. (a) Laser-induced assembly[21]; (b) comparison of laser sintering and bulk heating[27]; (c) laser-induced hydrothermal growth[28]
    Fig. 1. Typical “bottom-up” laser processing of micro/nano structures. (a) Laser-induced assembly[21]; (b) comparison of laser sintering and bulk heating[27]; (c) laser-induced hydrothermal growth[28]
    Typical manufacturing process of the direct laser writing based on the copper ionic precursor
    Fig. 2. Typical manufacturing process of the direct laser writing based on the copper ionic precursor
    Effect of laser parameters on the written copper structure[48]. (a) Width of structure; (b) composition;(c) microstructure
    Fig. 3. Effect of laser parameters on the written copper structure[48]. (a) Width of structure; (b) composition;(c) microstructure
    Comparison of resistivity and microstructure of the laser written copper structures based on different precursors
    Fig. 4. Comparison of resistivity and microstructure of the laser written copper structures based on different precursors
    Direct laser writing of Cu-based composite micro-nano structure. (a) Schematic diagram of the formation mechanism of the Cu-C composite structure[45]; (b) microstructure and elements distribution of the typical Cu-C composite structure; (c) comparison of oxidation resistance of Cu and Cu-C structures[47]; (d) structure of the directly written Cu oxides at a low laser power[48]
    Fig. 5. Direct laser writing of Cu-based composite micro-nano structure. (a) Schematic diagram of the formation mechanism of the Cu-C composite structure[45]; (b) microstructure and elements distribution of the typical Cu-C composite structure; (c) comparison of oxidation resistance of Cu and Cu-C structures[47]; (d) structure of the directly written Cu oxides at a low laser power[48]
    Typical applications of the conductive Cu structures. (a) Flexible electrode[47]; (b) monitoring the finger movement using the strain sensor[44]; (c) response of the proximity/touch sensor to finger touch[71]; (d) planar antenna and its bandwidth[45]
    Fig. 6. Typical applications of the conductive Cu structures. (a) Flexible electrode[47]; (b) monitoring the finger movement using the strain sensor[44]; (c) response of the proximity/touch sensor to finger touch[71]; (d) planar antenna and its bandwidth[45]
    Typical applications of the laser written functional Cu-based structures. (a) Flexible heater[47]; (b) quasi-solid capacitor and its cyclic voltammogram[46]; (c) monitoring the breath rate using the strain sensor[48]; (d) temperature sensor and its temperature response curves[84]
    Fig. 7. Typical applications of the laser written functional Cu-based structures. (a) Flexible heater[47]; (b) quasi-solid capacitor and its cyclic voltammogram[46]; (c) monitoring the breath rate using the strain sensor[48]; (d) temperature sensor and its temperature response curves[84]
    Xingwen Zhou, Jianing Liao, Yu Yao, Hui Kang, Wei Guo, Peng Peng. Direct Laser Writing of Micro/Nano Copper Structures and Their Applications[J]. Chinese Journal of Lasers, 2021, 48(8): 0802012
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