Yujie ZHANG, Lihua LEI, Yuqing GUAN, Liqin LIU, Chuangwei GUO, Zhangning XIE, Ruishu XU, Lijie LIANG, Qiang LI, Gang LING. Fusion metrology of nano-length traceability chain[J]. Infrared and Laser Engineering, 2025, 54(5): 20250074
- Infrared and Laser Engineering
- Vol. 54, Issue 5, 20250074 (2025)
Fig. 1. Schematic diagram of chromium atomic lithography technique
Fig. 2. "Top-down" and "bottom-up" nano-length traceability chains
Fig. 3. The line width and grating are used to compare the contours and key parameters of the measured images when comparing the carriers, respectively
Fig. 4. Linewidth calibration method based on silicon crystal plane spacing. (a) Direct traceability method; (b) Comparative traceability method
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