Ultra-Precision on-Machine Measurement of Fresnel Microstructure Based on Point Autofocus Sensor

Zhikai Yang; Zaozao Chen; Liangliang Mo; Xinquan Zhang

doi:10.3788/AOS230469

[1] Kim J, Kim S U, Lee B Y et al. Lenticular lens array based on liquid crystal with a polarization-dependent focusing effect for 2D-3D image applications[J]. Journal of Information Display, 16, 11-15(2015).

[2] Li X, Lan T, Wang Y et al. Design and study of Fresnel lens for an antenna in indoor visible light communication system[J]. Acta Physica Sinica, 64, 024201(2015).

[3] Yang T, Duan Y Z, Cheng D W et al. Freeform imaging optical system design: theories, development, and applications[J]. Acta Optica Sinica, 41, 0108001(2021).

[4] Noda T. Temperature compensation with DOE for zoom lens[J]. Proceedings of SPIE, 11106, 111060C(2019).

[5] Brizuela F, Bravo H, Vaschenko G et al. Nanoscale ablation with soft X-ray lasers[J]. Proceedings of SPIE, 6702, 67020L(2007).

[6] Cirino G A, Barcellos R, Morato S P et al. Design, fabrication, and characterization of Fresnel lens array with spatial filtering for passive infrared motion sensors[J]. Proceedings of SPIE, 6343, 634323(2006).

[7] Zhu R H, Sun Y, Shen H. Progress and prospect of optical freeform surface measurement[J]. Acta Optica Sinica, 41, 0112001(2021).

[8] Xu J, Min C J, Zhang Y Q et al. Imaging ultrafast evolution of subwavelength-sized topography using single-probe structured light microscopy[J]. Photonics Research, 10, 1900-1908(2022).

[9] Zhang X D, Zeng Z, Liu X L et al. Compensation strategy for machining optical freeform surfaces by the combined on- and off-machine measurement[J]. Optics Express, 23, 24800-24810(2015).

[10] Li D, Wang B, Tong Z et al. On-machine surface measurement and applications for ultra-precision machining: a state-of-the-art review[J]. The International Journal of Advanced Manufacturing Technology, 104, 831-847(2019).

[11] Gao W, Haitjema H, Fang F Z et al. On-machine and in-process surface metrology for precision manufacturing[J]. CIRP Annals, 68, 843-866(2019).

[12] Sun M N, Dong Z X, Xu W et al. A laser-based on-machine measuring system for double-headed screw rotor[J]. Chinese Journal of Lasers, 50, 1404002(2023).

[13] Liu X, Wang Z L, Yao P et al. Measurement and error compensation of 3D morphology with precision rotation line structured light[J]. Chinese Journal of Lasers, 49, 2104004(2022).

[14] Li Q, Xue J P, Zhang Q C et al. Three dimensional shape measurement of high reflective elements using camera response curve[J]. Acta Optica Sinica, 42, 0712001(2022).

[15] Miao Z X, Zhang Q C. Dual-frequency fringe for improving measurement accuracy of three-dimensional shape measurement[J]. Chinese Optics Letters, 19, 102601(2021).

[16] Tong Z, Zhong W B, Zeng W H et al. Closed-loop form error measurement and compensation for FTS freeform machining[J]. CIRP Annals, 70, 455-458(2021).

[17] Chen Z Z, Wang Z D, Ren M J et al. Development of an on-machine measurement system for ultra-precision machine tools using a chromatic confocal sensor[J]. Precision Engineering, 74, 232-241(2022).

[18] Leach R[M]. Optical Measurement of Surface Topography(2011).

[19] Maculotti G, Feng X B, Galetto M et al. Noise evaluation of a point autofocus surface topography measuring instrument[J]. Measurement Science and Technology, 29, 065008(2018).

[20] Fukatsu H, Yanagi K. Development of an optical stylus displacement sensor for surface profiling instruments[J]. Microsystem Technologies, 11, 582-589(2005).

[21] Miura K, Nose A, Suzuki H et al. Development and practicality of a scanning point autofocus instrument for high speed areal surface texture measurement[J]. Advanced Materials Research, 1017, 675-680(2014).

[22] Xi M M, Wang Y Q, Liu H B et al. Calibration of beam vector deviation for four-axis precision on-machine measurement using chromatic confocal probe[J]. Measurement, 194, 111011(2022).

[23] Byrd R H, Gilbert J C, Nocedal J. A trust region method based on interior point techniques for nonlinear programming[J]. Mathematical Programming, 89, 149-185(2000).