Ming Guo, Yongxiang Zhang, Wenying Zhang, Hong Li. Thermal damage of monocrystalline silicon irradiated by long pulse laser[J]. Infrared and Laser Engineering, 2020, 49(3): 0305002
- Infrared and Laser Engineering
- Vol. 49, Issue 3, 0305002 (2020)
Fig. 1. Experimental system for damage of monocrystalline silicon by long pulse laser
Fig. 2. Evolution of relationship between center temperature of monocrystalline silicon irradiated by lasers and time
Fig. 3. Relationship between the peak temperature of center point of monocrystalline silicon laser irradiation and the energy density and pulse width
Fig. 4. Temperature variation and with energy density and pulse width
Fig. 5. Cleavage damage structure of monocrystalline silicon
Fig. 6. Metallographic structure of multi-effect coupling damage in monocrystalline silicon
Fig. 7. Peak corrosion damage structure of monocrystalline silicon
Fig. 8. Relationships between damage depth and laser energy density
Fig. 9. Relationship between the etching depth of monocrystalline silicon and number of pulse
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