• Acta Optica Sinica
  • Vol. 35, Issue 4, 412004 (2015)
Zheng Donghui1、*, Chen Lei1, Li Bo2, Li Jinpeng1, and Wulan Tuya1
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
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    DOI: 10.3788/aos201535.0412004 Cite this Article Set citation alerts
    Zheng Donghui, Chen Lei, Li Bo, Li Jinpeng, Wulan Tuya. Research on Phase-Shifting Characteristic of Retarder Array in Simultaneous Phase-Shifting Interferometer[J]. Acta Optica Sinica, 2015, 35(4): 412004 Copy Citation Text show less

    Abstract

    To study the phase- shifting characteristic of retarder array in simultaneous phase- shifting interferometry, the relationship between phase shift and fast-axis azimuth error is deduced through Jones vector and Jones matrix, and the error propagation formula is given. A spherical mirror is measured by simultaneous phaseshifting interferometer based on retarder array without calibrating fast-axis azimuth accurately and Zygo GPI XP interferometer, the difference of root-mean-square and peak-to-valley are 0.003l and 0.033l respectively. The influence of azimuth error tolerance and phase shift error of retarder array and optical axis azimuth error of polarizer is discussed.
    Zheng Donghui, Chen Lei, Li Bo, Li Jinpeng, Wulan Tuya. Research on Phase-Shifting Characteristic of Retarder Array in Simultaneous Phase-Shifting Interferometer[J]. Acta Optica Sinica, 2015, 35(4): 412004
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